Dr. Kyoko Kojima Profile

Dr. Kyoko Kojima

Senior Researcher at Hitachi Ltd

SPIE Involvement:

Author

Area of Expertise:

Organic Chemistry , photosensitive materials , biochemistry , organic electric materials

Publications (6)

Proceedings Article | 12 April 2007 Paper

Distribution control of protecting groups and its effect on LER for EUV molecular resist

Daiju Shiono, Hideo Hada, Hiroto Yukawa, Hiroaki Oizumi, Iwao Nishiyama, Kyoko Kojima, Hiroshi Fukuda

Proceedings Volume 6519, 65193U (2007) https://doi.org/10.1117/12.711311

KEYWORDS: Line edge roughness, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Inspection, Scanning electron microscopy, Analytical research, Optical lithography, Silicon films, Silicon

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Proceedings Article | 22 March 2007 Paper

Material design of negative-tone polyphenol resist for EUV and EB lithography

Kyoko Kojima, Shigeki Mori, Daiju Shiono, Hideo Hada, Junichi Onodera

Proceedings Volume 6519, 65191D (2007) https://doi.org/10.1117/12.711759

KEYWORDS: Lithography, Extreme ultraviolet lithography, Line edge roughness, Extreme ultraviolet, Semiconductors, Molybdenum, Polymers, Inspection, Chromatography, Molecules

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Proceedings Article | 29 March 2006 Paper

Negative-tone polyphenol resist based on chemically amplified polarity change reaction with sub-50-nm resolution capability

Kyoko Kojima, Takashi Hattori, Hiroshi Fukuda, Taku Hirayama, Daiju Shiono, Hideo Hada, Junichi Onodera

Proceedings Volume 6153, 61530G (2006) https://doi.org/10.1117/12.656112

KEYWORDS: Line edge roughness, Lithography, Scanning electron microscopy, Etching, FT-IR spectroscopy, Potassium, Silicon, Extreme ultraviolet lithography, Inspection, Polymers

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Proceedings Article | 29 March 2006 Paper

Molecular resists based on cholate derivatives for electron-beam lithography

Daiju Shiono, Taku Hirayama, Hideo Hada, Junichi Onodera, Tadashi Arai, Atsuko Yamaguchi, Kyoko Kojima, Hiroshi Shiraishi, Hiroshi Fukuda

Proceedings Volume 6153, 61532D (2006) https://doi.org/10.1117/12.656949

KEYWORDS: Lithography, Etching, Silicon, Silicon films, Semiconducting wafers, FT-IR spectroscopy, Line edge roughness, Absorbance, Glasses, Argon

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Proceedings Article | 16 September 2003 Paper

Proposal of a multi-information-layer electrically selectable optical disk (ESD) using the same optics as DVD

Kyoko Kojima, Motoyasu Terao

Proceedings Volume 5069, (2003) https://doi.org/10.1117/12.533115

KEYWORDS: Digital video discs, Absorption, Polymers, Optical discs, Electrodes, Transmittance, Optical storage, Reflectivity, Photography, Polarons

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Proceedings Article | 14 June 1996 Paper

Negative resists for electron-beam lithography utilizing acid-catalyzed intramolecular dehydration of phenylcarbinol

Sonoko Migitaka, Shou-ichi Uchino, Takumi Ueno, Jiro Yamamoto, Kyoko Kojima, Michiaki Hashimoto, Hiroshi Shiraishi

Proceedings Volume 2724, (1996) https://doi.org/10.1117/12.241859

KEYWORDS: Lithography, Electron beam lithography, Polymers, Electron beams, Analytical research, Optical lithography, Chromatography, Temperature metrology, Custom fabrication, Fabrication

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Showing 5 of 6 publications

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