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Kyuchan Shim
at SK Hynix, Inc.
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Publications (1)
Proceedings Article | 13 March 2018 Paper
Accuracy optimization with wavelength tunability in overlay imaging technology
Honggoo Lee, Yoonshik Kang, Sangjoon Han, Kyuchan Shim, Minhyung Hong, Seungyoung Kim, Jieun Lee, Dongyoung Lee, Eungryong Oh, Ahlin Choi, Youngsik Kim, Tal Marciano, Dana Klein, Eitan Hajaj, Sharon Aharon , Guy Ben-Dov , Saltoun Lilach, Dan Serero, Anna Golotsvan
Proceedings Volume 10585, 1058532 (2018) https://doi.org/10.1117/12.2300153
KEYWORDS: Overlay metrology, Semiconducting wafers, Diffraction, Light sources, Imaging technologies, Integrated circuits, Visible radiation, Optical testing, Electromagnetism, Signal processing
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