Ms. Laurie Valbin Profile

Laurie Valbin

at Groupe ESIEE

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Publications (3)

Proceedings Article | 31 March 2006 Paper

Micromachined piezoelectric resonator at MHz application

T. Thao Le, Laurie Valbin, Fabrice Verjus, Tarik Bourouina

Proceedings Volume 6172, 61720M (2006) https://doi.org/10.1117/12.654762

KEYWORDS: Resonators, Aluminum nitride, Aluminum, Electrodes, Silicon, Acoustics, Optical lithography, Sputter deposition, Thin films, Quartz

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Proceedings Article | 1 October 2001 Paper

Piezoelectric aluminum nitride thin films for ultrasonic transducers

Laurie Valbin, Laure Sevely

Proceedings Volume 4559, (2001) https://doi.org/10.1117/12.443023

KEYWORDS: Aluminum nitride, Aluminum, Silicon, Ultrasonics, Transducers, Electrodes, Thin films, Deep reactive ion etching, Sputter deposition, Etching

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Proceedings Article | 25 August 2000 Paper

Low-temperature piezoelectric aluminum nitride thin film

Laurie Valbin, Laure Sevely, Serge Spirkovitch

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396425

KEYWORDS: Aluminum nitride, Thin films, Silicon, Aluminum, X-ray diffraction, Sputter deposition, Argon, Scanning electron microscopy, Atomic force microscopy, Wet etching

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