Dr. Leslie L. Deck Profile

Dr. Leslie L. Deck

Technology Fellow at Zygo Corporation

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 30 November 2023 Presentation + Paper

Dynamic illumination in phase-shifting interferometry

Leslie Deck, Nate Austin

Proceedings Volume 12778, 127780O (2023) https://doi.org/10.1117/12.2690821

KEYWORDS: Light sources and illumination, Mirrors, Fizeau interferometers, Optical surfaces, Phase shifts, Phase interferometry, Beam steering, Phase shifting, Mirror surfaces

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Proceedings Article | 1 August 2021 Presentation + Paper

The state of the art in swept-wavelength laser Fizeau interferometry

Leslie Deck, Peter de Groot

Proceedings Volume 11817, 118170N (2021) https://doi.org/10.1117/12.2595455

KEYWORDS: Interferometry, Reflection, Metrology, Interferometers, Phase shifts, Optics manufacturing, Wavelength tuning, Glasses, Phase shifting, Visualization

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Proceedings Article | 20 August 2020 Presentation + Paper

Solutions for environmentally robust interferometric optical testing

Erin McDonnell, Leslie Deck

Proceedings Volume 11487, 114870J (2020) https://doi.org/10.1117/12.2569458

KEYWORDS: Environmental sensing, Wavefronts, Metrology, Interferometry, Interferometers, Motion models, Turbulence, Optical testing, Vibrational characterization, Fizeau interferometers, Phase shifting

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Proceedings Article | 21 June 2019 Paper

Optical measurement of ground cylinder lead angle

Peter de Groot, Michael Schmidt, Leslie Deck

Proceedings Volume 11056, 110560X (2019) https://doi.org/10.1117/12.2527788

KEYWORDS: Lead, Optical testing, 3D metrology, Manufacturing, Metrology, Microscopy, 3D acquisition, Interferometry, Tolerancing, Image processing

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Proceedings Article | 7 August 2018 Paper

Characterizing the resolving power of laser Fizeau interferometers

Torsten Glaschke, Leslie Deck, Peter de Groot

Proceedings Volume 10829, 1082905 (2018) https://doi.org/10.1117/12.2317630

KEYWORDS: Spatial frequencies, Cameras, Fizeau interferometers, Optical transfer functions, Spectral resolution, Laser metrology, Metrology, Error analysis, Optical components, Surface finishing

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Proceedings Article | 21 May 2018 Paper

Optical metrology for immersive display components and subsystems

Peter de Groot, Leslie Deck

Proceedings Volume 10676, 106760B (2018) https://doi.org/10.1117/12.2317985

KEYWORDS: Metrology, Planar waveguides, Interferometers, Glasses, Optical metrology, Optical components, Interferometry, RGB color model, Cameras, Diamond turning

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Proceedings Article | 14 September 2011 Paper

Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer

Leslie Deck, Peter de Groot

Proceedings Volume 8133, 81330G (2011) https://doi.org/10.1117/12.893461

KEYWORDS: Interferometers, Cameras, Beam splitters, Distortion, Image resolution, Sensors, Monochromatic aberrations, Photovoltaics, Pellicles, Glasses

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Proceedings Article | 21 August 2009 Paper

High-performance multi-channel fiber-based absolute distance measuring interferometer system

Leslie Deck

Proceedings Volume 7405, 74050E (2009) https://doi.org/10.1117/12.826253

KEYWORDS: Sensors, Distance measurement, Heterodyning, Interferometers, Phase measurement, Calibration, Interferometry, Modulation, Phase shift keying, Modulators

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Proceedings Article | 11 August 2008 Paper

New algorithms and error analysis for sinusoidal phase shifting interferometry

Peter de Groot, Leslie Deck

Proceedings Volume 7063, 70630K (2008) https://doi.org/10.1117/12.795346

KEYWORDS: Phase shifts, Phase shifting, Error analysis, Cameras, Calibration, Sensors, Interference (communication), Phase interferometry, Optical testing, Algorithm development

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Proceedings Article | 27 September 2007 Paper

Suppressing vibration errors in phase-shifting interferometry

Leslie Deck

Proceedings Volume 6704, 670402 (2007) https://doi.org/10.1117/12.731421

KEYWORDS: Phase interferometry, Phase measurement, Virtual colonoscopy, Distortion, Phase shifts, Interferometry, Spatial resolution, Error analysis, Reflectivity, Environmental sensing

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Proceedings Article | 14 May 2007 Paper

High precision interferometer for measuring mid-spatial frequency departure in free form optics

Leslie Deck

Proceedings Volume 10316, 103160N (2007) https://doi.org/10.1117/12.719404

KEYWORDS: Objectives, Spatial frequencies, Microscopes, Interferometry, Calibration, Aspheric lenses, Interferometers, Metrology, Error analysis, Environmental sensing

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Proceedings Article | 14 May 2007 Paper

Compensation of vibration errors in high-performance interferometry

Leslie Deck

Proceedings Volume 10316, 103160V (2007) https://doi.org/10.1117/12.719429

KEYWORDS: Interferometry, Error analysis, Phase shifts, Distortion, Spatial resolution, Optical testing, Spatial frequencies, Optical spheres, Aspheric lenses, Photovoltaics

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Proceedings Article | 1 September 2005 Paper

High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics

Leslie Deck, Chris Evans

Proceedings Volume 5921, 59210A (2005) https://doi.org/10.1117/12.616874

KEYWORDS: Spatial frequencies, Microscopes, Interferometers, Interferometry, Fizeau interferometers, Objectives, Turbulence, Charge-coupled devices, Distortion, Optical testing

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Proceedings Article | 16 August 2004 Paper

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

David Grigg, Eric Felkel, John Roth, Xavier Colonna de Lega, Leslie Deck, Peter de Groot

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.546211

KEYWORDS: Microelectromechanical systems, Microscopy, Microopto electromechanical systems, Metrology, Thin films, Interferometry, Ferroelectric materials, Microscopes, Optical microscopy, Defect detection

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Proceedings Article | 2 August 2004 Paper

Environmentally friendly interferometry

Leslie Deck

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.559722

KEYWORDS: Phase shifts, Environmental sensing, Interferometry, Fourier transforms, Imaging systems, Fringe analysis, Cameras, Spatial frequencies, Interferometers, Image processing

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Proceedings Article | 28 August 2003 Paper

Measurement of hard pellicles for 157-nm lithography using Fourier transform phase-shifting interferometry

Leslie Deck, Chris Van Peski, Richard Eandi

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504217

KEYWORDS: Pellicles, Reticles, Lithography, Phase interferometry, Fourier transforms, Photomasks, Optical components, Precision measurement, Wavelength tuning, Manufacturing

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Proceedings Article | 19 June 2002 Paper

Absolute distance measurements using FTPSI with a widely tunable IR laser

Leslie Deck

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473544

KEYWORDS: Fourier transforms, Interferometers, Infrared lasers, Zerodur, Distance measurement, Interferometry, Tunable lasers, Precision measurement, Phase interferometry, Laser development

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Proceedings Article | 27 December 2001 Paper

Multiple-surface phase-shifting interferometry

Leslie Deck

Proceedings Volume 4451, (2001) https://doi.org/10.1117/12.453640

KEYWORDS: Phase interferometry, Interferometers, Wavelength tuning, Interferometry, Silicon, Reflection, Fourier transforms, Phase shifting, Precision measurement, Optical testing

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Proceedings Article | 11 November 1999 Paper

Phase-shifting via wavelength tuning in very large aperture interferometers

Leslie Deck, James Soobitsky

Proceedings Volume 3782, (1999) https://doi.org/10.1117/12.369221

KEYWORDS: Interferometers, Cameras, Wavelength tuning, Phase shifting, Optical testing, Phase shifts, Collimators, Imaging systems, Actuators, Modulation

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Proceedings Article | 29 December 1998 Paper

Coherence scanning in a geometrically desensitized interferometer

Leslie Deck, Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 3520, (1998) https://doi.org/10.1117/12.334345

KEYWORDS: Interferometers, Speckle pattern, Speckle, Diffusers, Cameras, Imaging systems, Optical interferometry, Coherence (optics), Metrology, Interferometry

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Proceedings Article | 6 July 1998 Paper

Adjustable coherence depth in a geometrically desensitized interferometer

Peter de Groot, Leslie Deck, Xavier Colonna de Lega

Proceedings Volume 3479, (1998) https://doi.org/10.1117/12.316446

KEYWORDS: Interferometers, Interferometry, Light, Light sources, Cameras, Glasses, Reflection, Grazing incidence, Superposition, Chlorine

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Proceedings Article | 25 September 1997 Paper

Reducing vibration effects in phase-shifting interferometry

Leslie Deck

Proceedings Volume 3100, (1997) https://doi.org/10.1117/12.287746

KEYWORDS: Phase measurement, Sensors, Cameras, Phase interferometry, Spatial resolution, Interferometry, Phase shifts, Interferometers, Data acquisition, Imaging arrays

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Proceedings Article | 18 September 1996 Paper

Optical flying-height testing of magnetic read-write heads

Peter de Groot, Leslie Deck, James Soobitsky, James Biegen

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250775

KEYWORDS: Head, Optical testing, Magnetism, Metrology, Distance measurement, Polarization, Interferometry, In situ metrology

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Proceedings Article | 15 November 1994 Paper

Surface profiling by frequency-domain analysis of white light interferograms

Peter de Groot, Leslie Deck

Proceedings Volume 2248, (1994) https://doi.org/10.1117/12.194308

KEYWORDS: Interferometry, Interferometers, Profiling, Phase interferometry, Microscopes, Distance measurement, Data acquisition, Data storage, Coherence (optics), Data centers

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Showing 5 of 24 publications

Conference Committee Involvement (5)

Advances in Metrology for X-Ray and EUV Optics V

18 August 2014 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics IV

12 August 2012 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics III

1 August 2010 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics II

30 August 2007 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics

2 August 2005 | San Diego, California, United States

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