Dr. Leslie M. Phinney Profile

Dr. Leslie M. Phinney

Principal Member of Technical Staff at Sandia National Labs

SPIE Involvement:

Author

Proceedings Article | 5 February 2010 Paper

Thermal microactuator performance as a function of mechanical stress

Leslie Phinney, Matthew Spletzer, Michael Baker, Justin Serrano

Proceedings Volume 7592, 75920V (2010) https://doi.org/10.1117/12.846370

KEYWORDS: Microactuators, Actuators, Raman spectroscopy, Microelectromechanical systems, Packaging, Thermal modeling, Microsystems, Data modeling, Performance modeling, Optical microscopes

Read Abstract +

SPIE Journal Paper | 1 October 2009

Effects of layers and vias on continuous-wave laser heating and damage of surface-micromachined structures

Justin Serrano, Leslie Phinney

JM3, Vol. 8, Issue 04, 043030, (October 2009) https://doi.org/10.1117/12.10.1117/1.3249657

KEYWORDS: Laser damage threshold, Microelectromechanical systems, Continuous wave operation, Laser irradiation, Laser induced damage, Semiconductor lasers, Infrared radiation, Multilayers, Absorption, Thermography

Read Abstract +

Proceedings Article | 6 January 2006 Paper

Experimental and computational study on laser heating of surface micromachined cantilevers

Leslie Phinney, Olga Spahn, C. Channy Wong

Proceedings Volume 6111, 611108 (2006) https://doi.org/10.1117/12.647487

KEYWORDS: Microelectromechanical systems, Laser irradiation, Microopto electromechanical systems, Pulsed laser operation, Silicon, Scanning electron microscopy, Numerical simulations, Interferometers, Physics, Absorption

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Damage of MEMS thermal actuators heated by laser irradiation

Leslie Phinney, Kelly Klody, John Sackos, Jeremy Walraven

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.594408

KEYWORDS: Actuators, Oxides, Microelectromechanical systems, Laser induced damage, Thermography, Optical fabrication, Laser irradiation, Silicon, Failure analysis, Target detection

Read Abstract +

Proceedings Article | 23 December 2003 Paper

Investigation of adhesion during operation of MEMS cantilevers

Shaikh Ali, Leslie Phinney

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.532891

KEYWORDS: Microelectromechanical systems, Actuators, Reliability, Interferometry, Power supplies, Oxides, Mirrors, Switches, Space based lasers, Prototyping

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Use of thermal cycling to reduce adhesion of OTS-coated MEMS cantilevers

Shaikh Ali, Leslie Phinney

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472731

KEYWORDS: Microelectromechanical systems, Promethium, Silicon, Self-assembled monolayers, Semiconducting wafers, Atomic force microscopy, Reliability, Oxides, Coating, Molecules

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Surface characterization and adhesion analysis for polysilicon surface micromachined flaps

Xiaojie Xue, Leslie Phinney

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472729

KEYWORDS: Silicon, Surface roughness, Microelectromechanical systems, Capillaries, Atomic force microscopy, Scanning electron microscopy, Atomic force microscope, HF etching, Etching, Humidity

Read Abstract +

Proceedings Article | 25 August 2000 Paper

Repair of stiction-failed surface-micromachined polycrystalline silicon cantilevers using pulsed lasers

Leslie Phinney, James Rogers

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396443

KEYWORDS: Silicon, Semiconductor lasers, Pulsed laser operation, Laser processing, Laser development, Nd:YAG lasers, Wet etching, Etching, Sapphire lasers, Laser systems engineering

Read Abstract +

Proceedings Article | 10 August 2000 Paper

Micro nano technology visualization (MNTV) of micromachined MEMS polysilicon structures

Russell Lawton, Gisela Lin, Joanne Wellman, Leslie Phinney, Jose Uribe, Edward Griffith, Ingrid De Wolf, Eric Lawrence

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395698

KEYWORDS: Microelectromechanical systems, Reliability, Visualization, Etching, Computer aided design, Data modeling, Oxides, Process modeling, Instrument modeling, Device simulation

Read Abstract +

Proceedings Article | 10 August 2000 Paper

Effects of temperature on surface adhesion in MEMS structures

Jeffrey Jennings, Leslie Phinney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395710

KEYWORDS: Carbon dioxide, Microelectromechanical systems, Carbon dioxide lasers, Failure analysis, Reliability, Temperature metrology, Laser irradiation, Silicon, Capillaries, Liquids

Read Abstract +

Showing 5 of 10 publications

Conference Committee Involvement (4)

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

23 January 2007 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

25 January 2006 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

25 January 2005 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS III

26 January 2004 | San Jose, California, United States

Keywords/Phrases

Search In:

Publication Years