Mr. Levi Jordan Profile

Levi Jordan

at Gigaphoton USA Inc

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Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

The development of a machine learning-based excimer laser performance simulator for engineering maintenance decisions

Jacob Strock, Levi Jordan, Yuji Minegishi, Satoshi Tanaka, Katsunori Isomoto, Takeshi Asayama, Takehiko Tomonaga, Yousuke Kawagoe, Yuuki Sakou

Proceedings Volume 12496, 124962U (2023) https://doi.org/10.1117/12.2658043

KEYWORDS: Deep learning, Lithography, Data modeling, Performance modeling, Machine learning, Education and training, Excimer lasers, Device simulation

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Proceedings Article | 20 March 2018 Paper

New open platform software for monitoring lithography process of semiconductor manufacturing

Yutaka Igarashi, Satoru Kikuchi, Levi Jordan, Kunihiko Abe, Yuji Minegishi

Proceedings Volume 10587, 1058712 (2018) https://doi.org/10.1117/12.2299491

KEYWORDS: Semiconducting wafers, Manufacturing, Lithography, Semiconductor manufacturing, Visualization, Light sources, Computer programming, Image processing, Software development, Standards development

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