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Lianzhi Wen
at Fraunhofer-ISIT
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Publications (3)
Proceedings Article | 2 March 2022 Presentation + Paper
Rapid control prototyping for Al(Sc)N based highly linear quasi-static MEMS mirrors with large optical apertures
N. Laske, S. Gu-Stoppel, J. Albers, L. Wen
Proceedings Volume 12013, 1201307 (2022) https://doi.org/10.1117/12.2609574
KEYWORDS: Mirrors, Finite impulse response filters, Microelectromechanical systems, Simulink, Filtering (signal processing), Actuators, Control systems, Micromirrors, MATLAB, Piezoelectric thin film actuators, Control systems design
Proceedings Article | 5 March 2021 Presentation + Paper
A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures
Proceedings Volume 11697, 116970F (2021) https://doi.org/10.1117/12.2583399
KEYWORDS: Optics manufacturing, Mirrors, Microelectromechanical systems, Design for manufacturability, Glasses, Actuators, Semiconducting wafers, Particles, Humidity
Proceedings Article | 5 March 2021 Presentation + Paper
A 2D circular-scanning piezoelectric MEMS mirror for laser material processing
F. Senger, S. Gu-Stoppel, L. Wen, J. Albers, M. Timmermann, Stefan Bruns, G. Piechotta, U. Bünting, M. Schulz-Ruhtenberg
Proceedings Volume 11697, 1169704 (2021) https://doi.org/10.1117/12.2584075
KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, Polygon scanners, Laser processing, Beam steering, Superposition, Signal processing, Reflectivity, Position sensors
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