With rapid developments of micro/nano science and technology, precision platforms are widely required in the research and industry fields. This paper presents a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism. With symmetrical flexible structure and specific piezoelectric driving manner, effective and decoupled actuation of the stator is achieved. FEA simulations are conducted to investigate the characteristics of the stator. With established dynamic model of the platform, motion responses of stator and slider in the two directions are simulated and analyzed. With simultaneous actuation of the 2-DOF motions, a motion interaction phenomenon is raised and discussed.
This paper presents a novel impact piezoelectric linear-rotary motor which is driven by a single piezoceramic tube with two parts of electrodes. From the inner and outer electrodes, longitudinal displacement of the tube is generated and used to actuate the shaft with linear motion ability. From the grooved helical interdigitated electrodes, torsional displacement is generated and used to actuate the shaft with rotary motion ability. Working principle and structural design of the motor are introduced and quasi-static longitudinal and torsional displacements of the tube are estimated. With established kinematics model of the motor, the working behaviors of the motor are investigated numerically with MATLAB/Simulink software. The stepping characteristics of the linear and rotary motions are analyzed, compared, and discussed. With optimized material selection, structural design, and driving parameters, the proposed linear-rotary motor will provide remarkable performances as a miniaturized multi-degree driving device for complex positioning and manipulation applications.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.