Lionel Riviere Cazaux
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2018 Paper
L. Liebmann, G. Northrop, M. Facchini, L. Riviere Cazaux, Z. Baum, N. Nakamoto, K. Sun, D. Chanemougame, G. Han, V. Gerousis
Proceedings Volume 10588, 1058808 (2018) https://doi.org/10.1117/12.2297634
KEYWORDS: Metals, Logic, Reliability, New and emerging technologies, Optical lithography, Manufacturing, Electronic design automation

Proceedings Article | 13 March 2009 Paper
Lionel Riviere-Cazaux, Philippe Hurat, Bala Kasthuri, Larry Layton, Nishath Verghese
Proceedings Volume 7275, 727506 (2009) https://doi.org/10.1117/12.813969
KEYWORDS: Design for manufacturing, Lithography, Field effect transistors, Optimization (mathematics), Logic, Tolerancing, Reliability, Photomasks, Silicon, Transistors

Proceedings Article | 13 March 2009 Paper
Chi-Min Yuan, Guy Assad, Bob Jarvis, Marc Olivares, Lionel Riviere Cazaux, Puneet Sharma, Jayathi Subramanian, Matt Thompson, Kevin Wu
Proceedings Volume 7275, 72750S (2009) https://doi.org/10.1117/12.813396
KEYWORDS: Design for manufacturing, Metals, Optical proximity correction, System on a chip, Yield improvement, Semiconducting wafers, Manufacturing, Reliability, Semiconductors, Electronic design automation

Proceedings Article | 5 May 2005 Paper
Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.601105
KEYWORDS: Model-based design, Optical proximity correction, Optical lithography, Data modeling, Lithography, Systems modeling, Semiconductors, Resolution enhancement technologies, Reticles, Semiconducting wafers

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