As the large-scale SiC materials, CCOS and MRF processing technology is gradually developing, optical manufacturing quickly entered the "era of giant mirror". As every basis of all optical processing, surface testing technology is facing enormous challenges with high efficiency and high precision and high accuracy. As an essential method in large aperture optical testing, we proposed a worthy attempt to estimate the actual surface error map RMS from individual measurement results. In order to overcome some actual working condition limits, it is a supplement to the state-of-the-art large sample averaging methods. This part of work is based on the orthogonality hypothesis, and proposed the real surface error estimation methods using interact scalar product. The experiment of a ∅3m aspherical mirror measurement and analysis indicates that the actual surface error RMS is 0.020~0.023λ, with estimation accuracy ±λ/700.
The swing arm profilometer (SAP) has been playing a very important role in testing large aspheric optics. As one of most significant error sources that affects the test accuracy, misalignment error leads to low-order errors such as aspherical aberrations and coma apart from power. In order to analyze the effect of misalignment errors, the relation between alignment parameters and test results of axisymmetric optics is presented. Analytical solutions of SAP system errors from tested mirror misalignment, arm length L deviation, tilt-angle θ deviation, air-table spin error, and air-table misalignment are derived, respectively; and misalignment tolerance is given to guide surface measurement. In addition, experiments on a 2-m diameter parabolic mirror are demonstrated to verify the model; according to the error budget, we achieve the SAP test for low-order errors except power with accuracy of 0.1 μm root-mean-square.
CCOS (Computer Controlled Optical Surfacing) is one of the most important method to manufacture optical surface.
By controlling the dwell time of a polishing tool on the mirror we can get the desired material removal. As the optical
surface becoming larger, traditional CCOS method can’t meet the demand that manufacturing the mirror in higher
efficiency and precision. This paper presents a new method using multi-mode optimization. By calculate the dwell time
map of different tool in one optimization cycle, the larger tool and the small one have complementary advantages and
obtain a global optimization for multi tool and multi-processing cycles. To calculate the dwell time of different tool at the
same time we use multi-mode dwell time algorithm that based on matrix calculation. With this algorithm we did
simulation experiment, the result shows using multi-mode optimization algorithm can improve the efficiency
maintaining good precision.
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