Dr. Luca Mezi Profile

Dr. Luca Mezi

at ENEA

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 30 January 2013 Paper

Extreme ultraviolet marking system for anti-counterfeiting tags with adjustable security level

P. Di Lazzaro, S. Bollanti, F. Flora, L. Mezi, D. Murra, A. Torre, F. Bonfigli, R. M. Montereali, M. A. Vincenti

Proceedings Volume 8677, 86770T (2013) https://doi.org/10.1117/12.2010400

KEYWORDS: Extreme ultraviolet, Laser induced fluorescence, Extreme ultraviolet lithography, Photomasks, Patents, Microscopes, Luminescence, Transistors, Ultraviolet radiation, Adhesives

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Proceedings Article | 22 April 2009 Paper

A laser-plasma clean soft x-ray source for projection microlithography

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 7131, 713116 (2009) https://doi.org/10.1117/12.816912

KEYWORDS: Mirrors, Extreme ultraviolet, Photomasks, Projection lithography, Plasmas, Projection systems, X-ray sources, Krypton, Laser development, Optical filters

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Proceedings Article | 2 October 2007 Paper

Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues

S. Bollanti, D. Amodio, A. Conti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre, C. Zheng, D. Garoli, M. Pelizzo, P. Nicolosi, V. Mattarello, V. Rigato, A. Gerardino

Proceedings Volume 6703, 670308 (2007) https://doi.org/10.1117/12.751442

KEYWORDS: Mirrors, Krypton, Argon, Extreme ultraviolet, Fluctuations and noise, Reflectivity, Plasma, Extreme ultraviolet lithography, Glasses, Copper

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Proceedings Article | 26 April 2007 Paper

Excimer-laser-driven EUV plasma source for one-shot one-pattern projection microlithography

P. Di Lazzaro, G. Altieri, D. Amodio, S. Bollanti, A. Conti, F. Flora, T. Letardi, L. Mezi, D. Murra, E. Tefouet Kana, A. Torre, C. E. Zheng

Proceedings Volume 6346, 63460M (2007) https://doi.org/10.1117/12.738084

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Extreme ultraviolet lithography, Databases, Excimer lasers, X-rays, Pulsed laser operation, Photoresist materials, Prototyping

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Proceedings Article | 7 December 2006 Paper

SPARC/X Projects

D. Alesini, S. Bertolucci, M. Biagini, R. Boni, M. Boscolo, M. Castellano, A. Clozza, G. Di Pirro, A. Drago, A. Esposito, M. Ferrario, V. Fusco, A. Gallo, A. Ghigo, S. Guiducci, M. Incurvati, C. Ligi, F. Marcellini, M. Migliorati, A. Mostacci, L. Palumbo, L. Pellegrino, M. Preger, R. Ricci, C. Sanelli, M. Serio, F. Sgamma, B. Spataro, A. Stecchi, A. Stella, F. Tazzioli, C. Vaccarezza, M. Vescovi, C. Vicario, F. Alessandria, A. Bacci, I. Boscolo, F. Broggi, S. Cialdi, C. De Martinis, D. Giove, C. Maroli, V. Petrillo, M. Romè, L. Serafini, D. Levi, G. Medici, M. Mattioli, P. Musumeci, L. Catani, E. Chiadroni, D. Moricciani, F. Ciocci, G. Dattoli, A. Doria, F. Flora, G. Gallerano, L. Giannessi, E. Giovenale, G. Messina, L. Mezi, P. Ottaviani, L. Picardi, M. Quattromini, A. Renieri, C. Ronsivalle, A. Cianchi, C. Schaerf, J. Rosenzweig

Proceedings Volume 5974, 59740K (2006) https://doi.org/10.1117/12.640290

KEYWORDS: Free electron lasers, Magnetism, Pulsed laser operation, Electron beams, X-rays, Picosecond phenomena, X-ray sources, Visible radiation, S band, Modulation

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Proceedings Article | 15 October 2005 Paper

Mask tilt effects counteracted by wafer tilts in a Schwarzschild objective based EUV lithography setup

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 5962, 59622Y (2005) https://doi.org/10.1117/12.624845

KEYWORDS: Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Mirrors, Wafer-level optics, Zemax, Solids, Extreme ultraviolet, Image resolution, Microscopes

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Proceedings Article | 12 October 2005 Paper

Recent results of laser-driven EUV and soft x-rays plasma source at ENEA Frascati

P. Di Lazzaro, S. Bollanti, A. Conti, F. Flora, L. Mezi, D. Murra, C. Zheng

Proceedings Volume 5958, 595814 (2005) https://doi.org/10.1117/12.621079

KEYWORDS: Plasma, Krypton, Extreme ultraviolet, Tantalum, Pulsed laser operation, Copper, Ions, X-rays, Excimer lasers, Solids

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Proceedings Article | 7 January 2004 Paper

Lithium fluoride coloration by laser-plasma soft x-rays: a promising tool for x-ray microscopy and photonics

Francesco Flora, Giuseppe Baldacchini, Francesca Bonfigli, Antonella Lai, Tiziana Marolo, Luca Mezi, Rosa Maria Montereali, Daniele Murra, Nicola Lisi, Enrico Nichelatti, Anatoly Faenov, Tatiana Pikuz, Libero Palladino, Armando Reale, Antonio Ritucci, Lucia Reale, Giuseppe Tomassetti, Pasquale Fabi, Tania Limongi

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.505782

KEYWORDS: Laser induced fluorescence, Fluorine, Lithium, X-rays, Crystals, X-ray microscopy, Extreme ultraviolet, Luminescence, X-ray lasers, Sensors

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Proceedings Article | 19 December 2003 Paper

Far-field, near-field, and interference patterns imaging in LiF crystals from a 46.9-nm capillary-discharge-pumped soft x-ray laser

Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Lucia Reale, Libero Palladino, Anatoly Faenov, Tatiana Pikuz, Francesco Flora, Luca Mezi, Giuseppe Baldacchini, Rosamaria Montereali, Francesca Bonfigli, L. Arrizza, Sergei Kukhlevsky, J. Kaiser

Proceedings Volume 5197, (2003) https://doi.org/10.1117/12.508063

KEYWORDS: Laser induced fluorescence, Capillaries, Plasma, Sensors, Pulsed laser operation, Diffraction, X-rays, X-ray lasers, Spatial resolution, Laser energy

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Proceedings Article | 12 December 2001 Paper

Effect of transverse electrical fields on x-ray amplification in a capillary-discharge Z-pinch

Sergei Kukhlevsky, Jozef Kaiser, Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Libero Palladino, Francesco Flora, Luca Mezi, Ida Kozma

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450602

KEYWORDS: Plasma, Capillaries, X-rays, Argon, Dielectrics, Magnetism, Ions, Data modeling, Autoregressive models, X-ray lasers

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Proceedings Article | 14 November 2001 Paper

Krypton as filter for ions, debris, and useless radiation in EUV projection lithography systems

Francesco Flora, Luca Mezi, Sarah Bollanti, Francesca Bonfigli, Paolo Di Lazzaro, Tommaso Letardi, Cheng En Zheng

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448452

KEYWORDS: Krypton, Ions, Extreme ultraviolet, Tantalum, Copper, Mirrors, Plasmas, Glasses, Clouds, Helium

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Proceedings Article | 14 November 2001 Paper

Fast collisional capillary discharge source for soft x-ray production and applications

Giuseppe Tomassetti, Libero Palladino, Antonio Ritucci, Lucia Reale, Tania Limongi, Sergei Kukhlevsky, Jozef Kaiser, Francesco Flora, Luca Mezi

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448460

KEYWORDS: Capillaries, X-rays, Plasma, Argon, X-ray sources, PIN photodiodes, Spectroscopy, Aluminum, X-ray microscopy, Capacitors

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Proceedings Article | 1 November 1997 Paper

Double-pulse excitation of x-ray capillary lasers

Sergei Kukhlevsky, Ida Kozma, Libero Palladino, Armando Reale, Francesco Flora, Luca Mezi, Gualtiero Giordano

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.284824

KEYWORDS: Plasmas, Electrons, Ionization, Tellurium, Capillaries, Ions, Pulsed laser operation, X-rays, X-ray lasers, Neon

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Proceedings Article | 16 August 1994 Paper

New technique for discharge electrodes design including asymmetric geometries

Luca Mezi, Francesco Flora

Proceedings Volume 2206, (1994) https://doi.org/10.1117/12.184602

KEYWORDS: Electrodes, Head, Excimer lasers, Optical simulations, Chemical elements, Gas lasers, Energy efficiency, Pollution, Inductance, Lasers

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Proceedings Article | 4 May 1993 Paper

Excimer laser development and applications at the ENEA Frascati Centre

Tommaso Letardi, Sarah Bollanti, Paolo Di Lazzaro, Honglie Fang, Francesco Flora, Shufen Fu, A. Gerardino, Gualtiero Giordano, Nicola Lisi, Luca Mezi, Giovanni Schina, Amalia Torre, Cheng En Zheng

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144661

KEYWORDS: X-rays, Laser development, Excimer lasers, Electrodes, Pulsed laser operation, Chemical lasers, Diodes, Switching, Excimers, Lasers

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Showing 5 of 15 publications

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