Dr. Lulu Lai Profile

Dr. Lulu Lai

at Shanghai Huali Integrated Circuit Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Yuyang Bian, Lulu Lai, Song Gao, Dandan Hu, Xijun Guan, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang, Yongyu Yuan, Yujie Xu

Proceedings Volume 11611, 116112I (2021) https://doi.org/10.1117/12.2583545

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lulu Lai, Yuyang Bian, Shaopeng Chen, Biqiu Liu, Rui Qian, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang

Proceedings Volume 11611, 116112J (2021) https://doi.org/10.1117/12.2583567

KEYWORDS: Fin field effect transistors, Signal processing, Optical alignment, Diffusion, Overlay metrology, Lithography, Integrated circuits, Etching

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