Unspecified Lynne Yuan Profile

Lynne Yuan

at Quanyi Mask Optoelectronics Technology (Jinan) Co Ltd

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Innovative applications: extending photomask registration tool for critical dimension measurement to achieve high efficiency

Yifei Yu, Leo Zeng, Kevin Wang, Xavier Chen, Christian Holl, Claire Lu, Phil Cha, Vic Chang, Robert Tsai, Jerry Wei, Lynne Yuan

Proceedings Volume 12751, 127510S (2023) https://doi.org/10.1117/12.2687005

KEYWORDS: Critical dimension metrology, Calibration, Photomasks, Data modeling, Opacity, Image registration, Cadmium, Design and modelling, Metrology, Optical microscopes

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