Dr. M. Dalil Rahman
Senior Staff Scientist at EMD Electronics
SPIE Involvement:
Author
Publications (51)

Proceedings Article | 7 April 2017 Paper
G. Mannaert, E. Altamirano-Sanchez, T. Hopf, F. Sebaai, C. Lorant, C. Petermann, S.-E. Hong, S. Mullen, E. Wolfer, D. Mckenzie, H. Yao, D. Rahman, J.-Y. Cho, M. Padmanaban, D. Piumi
Proceedings Volume 10149, 101490T (2017) https://doi.org/10.1117/12.2264323
KEYWORDS: Etching, Metals, Optical lithography, Photomasks, Plasma, System on a chip, Oxides, Contamination, Reflectivity, Silicon

Proceedings Article | 25 March 2016 Paper
Huirong Yao, Salem Mullen, Elizabeth Wolfer, Douglas McKenzie, Dalil Rahman, JoonYeon Cho, Munirathna Padmanaban, Claire Petermann, SungEun Hong, YoungJun Her
Proceedings Volume 9779, 97791O (2016) https://doi.org/10.1117/12.2220293
KEYWORDS: Resistance, Oxygen, Silicon, Semiconducting wafers

Proceedings Article | 20 March 2015 Paper
Huirong Yao, Alberto Dioses, Salem Mullen, Elizabeth Wolfer, Douglas McKenzie, Dalil Rahman, JoonYeon Cho, Munirathna Padmanaban, Claire Petermann, YoungJun Her, Yi Cao
Proceedings Volume 9425, 942518 (2015) https://doi.org/10.1117/12.2085811
KEYWORDS: Metals, Etching, Oxides, Photomasks, Dielectrics, Resistance, Semiconducting wafers, Coating, Silicon, Plasma etching

Proceedings Article | 27 March 2014 Paper
Takanori Kudo, M. Dalil Rahman, Douglas McKenzie, Clement Anyadiegwu, Sandra Doerrenbaecher, Wolfgang Zahn, Munirathna Padmanaban
Proceedings Volume 9051, 90511X (2014) https://doi.org/10.1117/12.2046293
KEYWORDS: System on a chip, Polymers, Carbon, Etching, Silicon, Photomasks, Plasma etching, Semiconducting wafers, Resistance, Coating

Proceedings Article | 29 March 2013 Paper
Huirong Yao, Salem Mullen, Elizabeth Wolfer, Dalil Rahman, Clement Anyadiegwu, Douglas Mckenzie, Alberto Dioses, Joonyeon Cho, Munirathna Padmanaban
Proceedings Volume 8682, 86820S (2013) https://doi.org/10.1117/12.2011226
KEYWORDS: Etching, Metals, Semiconducting wafers, Photomasks, Silicon, Coating, Oxides, Extreme ultraviolet lithography, Lithography, Photoresist materials

Showing 5 of 51 publications
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