Ms. Myung-Gi Kang Profile

Myung-Gi Kang

at Hanyang Univ

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Publications (1)

Proceedings Article | 16 October 2017 Paper

Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow

Myung-Gi Kang, Sung-Gyu Lee, Eun-Sang Park, Hye-Keun Oh

Proceedings Volume 10450, 104501N (2017) https://doi.org/10.1117/12.2280691

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Convection, Cooling systems, Finite element methods, Silicon, Hydrogen, Photomasks, Radiation effects

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