Dr. Maggie Lankford Profile

Dr. Maggie Lankford

at Air Force Research Lab

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Publications (1)

Proceedings Article | 4 October 2024 Presentation

Automated nanoscale multi-layer optical materials growth with reactive magnetron sputtering and in situ ellipsometry

John Jones, Peter Stevenson, Maggie Lankford, Cynthia Bowers, Lirong Sun, Joseph Garbarino, Lyuba Kuznetsova

Proceedings Volume PC13116, PC1311602 (2024) https://doi.org/10.1117/12.3025638

KEYWORDS: Sputter deposition, Magnetrons, Ellipsometry, Refractive index, Optical properties, Materials properties, Hyperbolic metamaterials, Vacuum, Spectroscopic ellipsometry, Silicon

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