Ms. Maihan H. Nguyen Profile

Maihan H. Nguyen

Photolithography Engineer at Samsung Austin Semiconductor

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Publications (1)

Proceedings Article | 8 November 2005 Paper

Haze defect control and containment in a high volume DRAM manufacturing environment

Jerry Chen, Maihan Nguyen, Osamu Arasaki, Tammy Maraquin, Daniel Sawyer, Pedro Morrison

Proceedings Volume 5992, 59923I (2005) https://doi.org/10.1117/12.632188

KEYWORDS: Reticles, Air contamination, Control systems, Wafer inspection, Inspection, Semiconducting wafers, Manufacturing, Databases, Semiconductors, Process control

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