Malavika Sharma
at Siemens EDA
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 26 August 2024 Paper
Ingo Bork, Rachit Sharma, Malavika Sharma, Archana Rajagopalan, Bhardwaj Durvasula, Kushlendra Mishra, Mary Zuo
Proceedings Volume 13177, 131770B (2024) https://doi.org/10.1117/12.3034234
KEYWORDS: Backscatter, Printing, Scattering, Forward error correction, Critical dimension metrology, Calibration, Etching, Photomasks, Photomask modeling

Proceedings Article | 21 November 2023 Presentation + Paper
Ingo Bork, Rachit Sharma, Malavika Sharma, Archana Rajagopalan, Bhardwaj Durvasula, Kushlendra Mishra, Mary Zuo
Proceedings Volume 12751, 127510Y (2023) https://doi.org/10.1117/12.2688502
KEYWORDS: Modulation, Scattering, SRAF, Photomask technology, Backscatter, Photomasks, Manufacturing, Forward error correction, Extreme ultraviolet, Etching

Proceedings Article | 1 December 2022 Presentation + Paper
Rachit Sharma, Mary Zuo, Ingo Bork, Archana Rajagopalan, Malavika Sharma, Kushlendra Mishra
Proceedings Volume 12293, 1229309 (2022) https://doi.org/10.1117/12.2641760
KEYWORDS: Calibration, Photomasks, Process modeling, Optimization (mathematics), Model-based design, Manufacturing, Lithography, Source mask optimization

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 118550Q (2021) https://doi.org/10.1117/12.2600959
KEYWORDS: Computational lithography, Photomasks, Optical proximity correction, Process modeling, Model-based design, Manufacturing

Proceedings Article | 16 October 2019 Presentation + Paper
Charles Whiting, Ingo Bork, Peter Buck, Robin Chia, Bharadwaj Durvasula, Daniel Hill, Gazi Huda, Ken Jantzen, Matthew Leuthold, Jianliang Li, Joerg Mellmann, Kushlendra Mishra, Jed Rankin, Nageswara Rao, Malavika Sharma, Rachit Sharma, Adam Smith, Michaela Wentz
Proceedings Volume 11148, 1114805 (2019) https://doi.org/10.1117/12.2538347
KEYWORDS: Photomasks, Data modeling, Optical proximity correction, Critical dimension metrology, Calibration, Lithography, Semiconducting wafers, Manufacturing, Opacity, Etching

Showing 5 of 8 publications
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