We employ aligned two-photon lithography (A2PL®), to push high precision alignment tasks from the photonic packaging step towards the fabrication process in a one step process. Combined with Two-Photon Grayscale Lithography (2GL®), this approach enables direct fabrication of micro-optical elements onto devices, enhancing functionality with highest surface quality and shape fidelity at high throughput. We demonstrate automated 3D alignment using customer-ready detection algorithms, to fabricate micro-optical elements attached to various topographies and material platforms with exceptional accuracy below 100 nm. We showcase micro-optical elements aligned to fiber tips, photonic edge couplers, and photonic grating couplers to demonstrate the validity of A2PL for improved coupling losses and beam quality.
We present recent advancements in two-photon grayscale lithography (2GL®). In contrast to one-photon grayscale lithography, for 2GL®, the exposed volume pixel is strongly confined to the vicinity of the laser focus allowing for a truly 3-dimensional dose control with very high spatial resolution. Discrete and accurate steps, as well as essentially continuous topographies, can be printed with increased throughput, on any substrate, and without the need for additional lithography steps or mask fabrication. We update on throughput and quality levels of the method. As demonstrators, we fabricate and characterize optics masters for replication technologies like nanoimprint lithography.
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