Dr. Markus R. Weiss Profile

Dr. Markus R. Weiss

at Carl Zeiss SMT GmbH

SPIE Involvement:

Author

Publications (14)

Proceedings Article | 9 November 2015 Paper

Actinic review of EUV masks: status and recent results of the AIMS EUV system

Sascha Perlitz, Jan Hendrik Peters, Markus Weiss, Dirk Hellweg, Renzo Capelli, Krister Magnusson, Matt Malloy, Stefan Wurm

Proceedings Volume 9635, 96351D (2015) https://doi.org/10.1117/12.2205054

KEYWORDS: Extreme ultraviolet, Photomasks, Prototyping, Extreme ultraviolet lithography, Electromagnetic coupling, Metrology, Calibration, Scanners, Image acquisition, Image processing

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Proceedings Article | 16 March 2015 Paper

Actinic review of EUV masks: Status and recent results of the AIMS EUV system

Markus Weiss, Dirk Hellweg, Markus Koch, Jan Hendrik Peters, Sascha Perlitz, Anthony Garetto, Krister Magnusson, Renzo Capelli, Vibhu Jindal

Proceedings Volume 9422, 942219 (2015) https://doi.org/10.1117/12.2086265

KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Imaging systems, Line width roughness, Scanners, Prototyping, EUV optics, Metrology, Reflectivity

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Proceedings Article | 29 October 2014 Paper

AIMS EUV first light imaging performance

Anthony Garetto, Renzo Capelli, Krister Magnusson, Jan Hendrik Peters, Sascha Perlitz, Ulrich Matejka, Dirk Hellweg, Markus Weiss, Michael Goldstein

Proceedings Volume 9235, 92350N (2014) https://doi.org/10.1117/12.2068308

KEYWORDS: Extreme ultraviolet, Photomasks, Scanners, Extreme ultraviolet lithography, Inspection, Electromagnetic coupling, Scanning electron microscopy, Prototyping, Manufacturing, Logic

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Proceedings Article | 24 April 2014 Paper

Actinic review of EUV masks: first results from the AIMS EUV system integration

Markus Weiss, Dirk Hellweg, Jan Hendrik Peters, Sascha Perlitz, Anthony Garetto, Michael Goldstein

Proceedings Volume 9048, 90480X (2014) https://doi.org/10.1117/12.2046302

KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Critical dimension metrology, Reticles, Scanners, System integration, Metrology, Prototyping, Manufacturing

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Proceedings Article | 1 October 2013 Paper

Status of the AIMS EUV development project

Anthony Garetto, Jan Hendrik Peters, Dirk Hellweg, Markus Weiss

Proceedings Volume 8886, 88860I (2013) https://doi.org/10.1117/12.2031611

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Scanners, Photomasks, Electromagnetic coupling, Metrology, Prototyping, Inspection, Manufacturing, Reticles

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Proceedings Article | 8 November 2012 Paper

Status of the AIMS(TM) EUV Project

Anthony Garetto, Jan Hendrik Peters, Sascha Perlitz, Ulrich Matejka, Dirk Hellweg, Markus Weiss

Proceedings Volume 8522, 852220 (2012) https://doi.org/10.1117/12.981345

KEYWORDS: Extreme ultraviolet, Photomasks, Prototyping, Manufacturing, Climatology, Particles, Inspection, Scanners, Metrology, Extreme ultraviolet lithography

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Proceedings Article | 23 March 2012 Paper

Closing the infrastructure gap: status of the AIMS EUV project

Dirk Hellweg, Markus Weiss, Sascha Perlitz, Jan Hendrik Peters, Wolfgang Harnisch, Michael Goldstein

Proceedings Volume 8322, 83220L (2012) https://doi.org/10.1117/12.918691

KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Scanners, Inspection, Manufacturing, Semiconducting wafers, Multilayers, Mirrors, Metrology

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Proceedings Article | 14 October 2011 Paper

Development status and infrastructure progress update of aerial imaging measurements on EUV masks

Sascha Perlitz, Wolfgang Harnisch, Ulrich Strößner, Jan Hendrik Peters, Markus Weiss, Dirk Hellweg

Proceedings Volume 8166, 816610 (2011) https://doi.org/10.1117/12.899038

KEYWORDS: Extreme ultraviolet, Photomasks, Manufacturing, Plasma, Extreme ultraviolet lithography, Airborne remote sensing, Light sources, Metrology, EUV optics, Electron beam lithography

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Proceedings Article | 16 June 2003 Paper

EUV time-resolved studies on carbon growth and cleaning

Bas Mertens, Bas Wolschrijn, Rik Jansen, Norbert Koster, Markus Weiss, Marco Wedowski, Roman Klein, Thomas Bock, Reiner Thornagel

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.504542

KEYWORDS: Reflection, Carbon, Mirrors, Extreme ultraviolet, Contamination, Oxygen, Reflectivity, Reflectometry, Extreme ultraviolet lithography, Oxidation

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Proceedings Article | 3 November 1997 Paper

Optimization of a spectromicroscopy beamline at BESSY II

Christian Jung, Johannes Bahrdt, Uwe Flechsig, Markus Weiss

Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.283977

KEYWORDS: Mirrors, Microscopes, Monochromators, Dispersion, Spatial resolution, Ray tracing, Synchrotrons, Optical components, Microscopy, Synchrotron radiation

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Proceedings Article | 11 November 1994 Paper

Grazing incidence mirror for a new microspectroscope using soft x-ray undulator radiation

Markus Weiss, V. Wuestenhagen, E. Umbach

Proceedings Volume 2279, (1994) https://doi.org/10.1117/12.193127

KEYWORDS: Spatial resolution, Mirrors, Grazing incidence, Diffraction, X-rays, Scattering, Manufacturing, Ray tracing, Spatial frequencies, Optics manufacturing

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SPIE Journal Paper | 1 April 1991

Autocorrelation via two-wave mixing in barium titanate

Markus Weiss, Azad Siahmakoun

OE, Vol. 30, Issue 04, (April 1991) https://doi.org/10.1117/12.10.1117/12.167658

KEYWORDS: Crystals, Two wave mixing, Ferroelectric materials, Fourier transforms, Photorefraction, Laser crystals, Nonlinear crystals, Convolution, Image enhancement, Wave propagation

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Proceedings Article | 1 March 1991 Paper

Optical neural networks: an implementation

Azad Siahmakoun, Steven Blair, Markus Weiss

Proceedings Volume 1396, (1991) https://doi.org/10.1117/12.47755

KEYWORDS: Neural networks, Crystals, Neurons, Systems modeling, Content addressable memory, Binary data, Fourier transforms, Holograms, Ferroelectric materials, Prisms

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Proceedings Article | 1 July 1990 Paper

Enhancement of fringe visibility by squaring with photorefractive processor

Markus Weiss, Azad Siahmakoun

Proceedings Volume 1319, (1990) https://doi.org/10.1117/12.22236

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Showing 5 of 14 publications

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