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Martin Paul
at Bundesanstalt für Materialforschung und -prüfung
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Publications (1)
Proceedings Article | 18 April 2021 Presentation + Paper
A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing
Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael Weller, Andreas Mai
Proceedings Volume 11772, 1177206 (2021) https://doi.org/10.1117/12.2588791
KEYWORDS: Microfluidics, Silicon, Silicon photonics, Biomedical optics, Waveguides, Resonators, Biosensors, Biosensing, Wet etching, Sensors
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