In this study, a combined two-color phase plate (CTPP) was designed for super-resolution microscopy based on upconversion fluorescence depletion (FD), fabricated, and evaluated. It is composed of two types of phase plates, a spiral phase plate and an annular phase plate. A two-color phase plate modulates the phase of the erase beam while maintaining the phase of the pump beam. SRM performed using the proposed CTPP is expected to enable super resolution in both the focal plane and in the optical axis direction. Despite its complex structure, a highly accurate CTPP was obtained by using the exposure and etching processes used in semiconductor manufacturing.
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