Dr. Masaaki Ichiki Profile

Dr. Masaaki Ichiki

Researcher at AIST

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 11 January 2008 Paper

Photovoltaic properties of ferroelectrics and their applications to optical sensor

Masaaki Ichiki, Harumi Furue, Takeshi Kobayashi, Yasushi Morikawa, Kazuhiro Nonaka, Ryutaro Maeda

Proceedings Volume 6800, 680011 (2008) https://doi.org/10.1117/12.760416

KEYWORDS: Photovoltaics, Electrodes, Crystals, Microelectromechanical systems, Optical sensors, Semiconductors, Lead, Scanning electron microscopy, Optical properties, Ferroelectric materials

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Proceedings Article | 9 January 2008 Paper

Novel MEMS-based thermometer with low power consumption for health-monitoring network application

Y. Zhang, T. Ikehara, J. Lu, T. Kobayashi, M. Ichiki, T. Itoh, R. Maeda

Proceedings Volume 6800, 68001V (2008) https://doi.org/10.1117/12.759296

KEYWORDS: Temperature metrology, Metals, Confocal microscopy, Microfabrication, Finite element methods, Sensor technology, Gold, Molybdenum, Microelectromechanical systems, Temperature sensors

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Proceedings Article | 22 December 2006 Paper

Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

Z. Wang, H. Kokawa, H. Takizawa, M. Ichiki, R. Maeda

Proceedings Volume 6413, 641308 (2006) https://doi.org/10.1117/12.695608

KEYWORDS: Ferroelectric materials, Microwave radiation, Crystals, Thin films, Silicon, Sol-gels, Scanning electron microscopy, Microelectromechanical systems, Annealing, Perovskite

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Proceedings Article | 5 January 2006 Paper

Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film

Masaaki Ichiki, Harumi Furue, Takeshi Kobayashi, Yasushi Morikawa, Takeshi Nakada, Chiaki Endo, Kazuhiro Nonaka, Ryutaro Maeda

Proceedings Volume 6035, 60350P (2006) https://doi.org/10.1117/12.638323

KEYWORDS: Photovoltaics, Crystals, Semiconductors, Optical sensors, Microelectromechanical systems, Lead, Optical properties, Ferroelectric materials, Lanthanum, Scanning electron microscopy

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Proceedings Article | 2 April 2004 Paper

Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror

Takeshi Kobayashi, Jiunnjye Tsaur, Masaaki Ichiki, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.530229

KEYWORDS: Ferroelectric materials, Mirrors, Micromirrors, Silicon, Etching, Wavelength division multiplexing, Sol-gels, Actuators, Scanning electron microscopy, Electrodes

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Proceedings Article | 2 April 2004 Paper

Formation and its characteristics of PLZT layered film structure for transducers

Masaaki Ichiki, Takeshi Kobayashi, Yasushi Morikawa, Yosuke Mabune, Takeshi Nakada, Kazuhiro Nonaka, Chiaki Endo, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522794

KEYWORDS: Photovoltaics, Electrodes, Ceramics, Crystals, Transducers, Microelectromechanical systems, Scanning electron microscopy, Lead, Photovoltaic materials, Perovskite

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Proceedings Article | 13 November 2002 Paper

Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers

Jiunn-Jye Tsaur, Zhanjie Wang, Lulu Zhang, Masaaki Ichiki, Ryutaro Maeda, Tadatomo Suga

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469675

KEYWORDS: Ferroelectric materials, Mirrors, Sol-gels, Silicon, Laser ablation, Semiconducting wafers, Silicon films, Polarization, Actuators, Scanning electron microscopy

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Proceedings Article | 13 November 2002 Paper

Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Lulu Zhang, Masaaki Ichiki, Zhanjie Wang, Ryutaro Maeda

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469049

KEYWORDS: Ferroelectric materials, Sol-gels, Laser ablation, Thin films, Dielectric polarization, Dielectrics, Fabrication, Excimer lasers, Crystals, Perovskite

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Proceedings Article | 9 July 2001 Paper

Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Masaaki Ichiki, Lulu Zhang, Zhanjie Wang, Yasushi Morikawa, Makoto Tanaka, Ryutaro Maeda

Proceedings Volume 4467, (2001) https://doi.org/10.1117/12.432952

KEYWORDS: Ferroelectric materials, Scanning electron microscopy, Lead, Annealing, Crystals, Heat treatments, X-ray diffraction, Laser ablation, Deposition processes, Perovskite

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Proceedings Article | 14 November 1997 Paper

Characterization and application of jet-printed thin PZT layers for actuation of MEMS

Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293560

KEYWORDS: Ferroelectric materials, Microelectromechanical systems, Annealing, Dielectrics, Actuators, Electrodes, Silicon, Temperature metrology, Deposition processes, Erbium

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Proceedings Article | 14 November 1997 Paper

Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator

Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo, Sohei Matsumoto

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293545

KEYWORDS: Ferroelectric materials, Actuators, Electrodes, Scanners, Silicon, Printing, Microelectromechanical systems, Laser ablation, Anisotropic etching, Interferometers

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Showing 5 of 11 publications

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