We describe the wavefront measurement interferometry technologies suitable for microlenses. It is common for microlenses to exhibit large aberrations and microlens arrays can introduce additional negative effects from the array when the wavefront aberration is measured. In the case of a microlens array, stray light may be generated by the rest of the microlenses during measurement. A single-pass interferometer, such as the Mach-Zehnder interferometer, is a good solution. It is sometimes difficult to maintain a conjugate condition due to large aberrations when a double-pass interferometer, such as a Fizeau interferometer, is used. Interferometers usually use a software aperture to define the calculation area for wavefront aberration measurement. But we determine the effectiveness of the hardware aperture in reducing the noise in the interferometer optics compared to the use of the software aperture. The result of a theoretical investigation shows the effects of the hardware, and the software apertures are almost the same. An experimental investigation is also made using a Mach-Zehnder interferometer with both hardware and software apertures. The hardware aperture is inserted into the interferometer optics and is projected to reduce the effective size of aperture on the pupil of the microlens to avoid the Fresnel diffraction. Finally, the theoretical and experimental results show good correspondence. We show the necessity of the wavefront aberration measurement interferometer technologies for microlenses.
We have carried out wavefront aberration measurement with the reduction projection of an aperture on the pupil of the test microlens set in the interferometer optics. The size of the image of the aperture determines the effective aperture of the microlens, and proposes aperture restriction methods to reduce the influence of the Fresnel diffraction. Wavefront aberrations were measured and evaluated by the use of phase shift method applied to the Mach-Zehnder interferometer. We studied if we can form an image of an aperture stop on the pupil plane of the test microlens. The evaluation of the effect of the aperture on the fringe quality was evaluated through the prototype equipment using the microlens of less than 30 micrometers in diameter. In this paper, we describe the method of reducing the measurement error of wavefront aberration using the effective diameter of the microlens.
We describe here characteristic properties relating to the interferometrical measuring of microlens with an effective numerical aperture determined by the software or the hardware. Starting from the wave equation, both of the amplitude and the phase of propagating optical beams can be calculated using Hankel transformation anywhere through the interferometer. First introducing the effective aperture determined by the hardware including the method of projecting the effective aperture on the pupil of the microlens, the effect of truncation or diffraction with the effective aperture on the beam propagation is shown. Next using Mach-Zehnder interferometer combined with the effective aperture, the measurement of the wavefront aberration of test microlens is simulated to show that the imaginary aperture by the software settled on the image sensor which is located at the conjugate position of the test microlens is equivalent to the hardware determined effective aperture including projected one. Numerical results are presented to show the measurement errors stay within λ/100 for two typical test microlens of 38 μmΦ and 125 μmΦ with 1 λ wavefront aberration for aberration-free measuring optics with large enough numerical aperture.
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