Dr. Masanori Nakatani Profile

Dr. Masanori Nakatani

at Univ of Hyogo

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 4 March 2015 Paper

Evaluation of crack-healing behavior in SiNx/SiC nanolaminated thin film by microbending test

M. Nakatani, Y. Tonoya, Y. Harada

Proceedings Volume 9302, 93020S (2015) https://doi.org/10.1117/12.2078930

KEYWORDS: Silicon carbide, Ion beams, Thin films, Oxides, Nanolithography, Silicon, Silicon films, Ceramics, Silica, Oxidation

Read Abstract +

The purpose of this study is to evaluate the crack-healing behavior of SiN_x/SiC nanolaminated films quantitatively. SiN_x/SiC nanolaminated films were fabricated by alternating ion-beam assisted deposition of SiN_x and SiC. The fabricated nanolaminated films consisted of four layers with the top layer being SiN_x. Smooth and notched microbeam specimens were fabricated using a focused ion beam (FIB) system. The nanosized notch was introduced in form of an imitational crack on the film surface by FIB. Some notched samples were heated at 1000 ºC for 24 to 96 h in air. The fracture strength was evaluated by bending tests using a nanoindentation system. After heating, the notch was filled with reaction products. Energy dispersive X-ray (EDX) analysis revealed that the reaction products contained oxide compounds, most likely SiO₂. The fracture load of the notched specimens recovered with increasing heating time. The filling of the notch with oxidation products caused the recovery of the fracture load. However, the recovery was not complete compared with the strength of a smooth sample. It is concluded that the filling of a notch with oxidation products recovers the mechanical strength of SiN_x/SiC nanolaminated films only to a certain extent.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years