Mr. Michael C. Schmittdiel Profile

Michael C. Schmittdiel

at Georgia Institute of Technology

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Publications (2)

Proceedings Article | 22 January 2005 Paper

Actively controlled diffraction grating interferometer MEMS devices

Byungki Kim, Michael Schmittdiel, F. Degertekin, Thomas Kurfess

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.592215

KEYWORDS: Microelectromechanical systems, Diffraction gratings, Control systems, Interferometers, Sensors, Actuators, Metrology, Microlens, Modulation, Measurement devices

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Proceedings Article | 24 January 2004 Paper

Deformable diffraction grating for scanning microinterferometer arrays

Byungki Kim, Michael Schmittdiel, F. Levent Degertekin, Thomas Kurfess

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.527458

KEYWORDS: Interferometers, Microelectromechanical systems, Diffraction gratings, Actuators, Control systems, Optical design, Microfabrication, Semiconducting wafers, Electrodes, Signal detection

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