Dr. Michael S. Sevegney Profile

Dr. Michael S. Sevegney

Sr. Engineer at SAMSUNG Austin Semiconductor LLC

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Publications (3)

Proceedings Article | 29 March 2013 Paper

Effects of dispense equipment sequence on process start-up defects

Nick Brakensiek, Michael Sevegney

Proceedings Volume 8682, 86822A (2013) https://doi.org/10.1117/12.2011671

KEYWORDS: Semiconducting wafers, Particles, Chemical elements, Lithography, Silicon, Metrology, Microfluidics, Chemistry, Solids, Carbon

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Proceedings Article | 19 March 2012 Paper

Solvent pre-wetting as an effective start-up method for point-of-use filter

Toru Umeda, Shinichi Sugiyama, Takashi Nakamura, Makoto Momota, Michael Sevegney, Shuichi Tsuzuki, Toru Numaguchi

Proceedings Volume 8325, 83252H (2012) https://doi.org/10.1117/12.916026

KEYWORDS: Lithography, Radium, Manufacturing, Semiconducting wafers, Error analysis, Electronic filtering, Transducers, Inspection, Molecular interactions, Hydrogen

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Proceedings Article | 1 April 2009 Paper

Microbridge and e-test opens defectivity reduction via improved filtration of photolithography fluids

Michael Mesawich, Michael Sevegney, Barry Gotlinsky, Santos Reyes, Patrick Abbott, Jeremy Marzani, Mario Rivera

Proceedings Volume 7273, 72730O (2009) https://doi.org/10.1117/12.814374

KEYWORDS: Ozone, Particles, Optical lithography, Microfluidics, Manufacturing, Photoresist materials, Back end of line, Semiconductors, Bridges, Lithography

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