Mr. Michael Tamme Profile

Michael Tamme

Global Product Specialist Photomask Equipment at HamaTech APE GmbH & Co KG

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 18 September 1995 Paper

Advanced ellipsometry for very thin films and multilayers

Peter Paduschek, Michael Tamme, Thomas Hankey

Proceedings Volume 2638, (1995) https://doi.org/10.1117/12.221193

KEYWORDS: Ellipsometry, Multilayers, Thin films, Refractive index, Interferometers, Oxides, Optical parametric oscillators, Semiconductors, Interferometry, Absorption

Read Abstract +

In an introduction, problems of modern thin film research and production of thin films are discussed. Possible solutions with different measurement methods like nulling ellipsometers, RAE-ellipsometry, spectroscopic ellipsometry, and interferometry are compared. RAE- ellipsometry with respect to precision for thin films below 100 angstrom are discussed. Repeatabilities of below 0.1 angstrom are shown. Thicker films even above a few microns can be evaluated with multi-wavelength measurements at distinct wavelengths at 543 nm, HeNe, 790 nm, IR 1.3 micrometers , and IR 1.5 micrometers . This interferometer emulation concept is practically free of order ambiguity--a problem with traditional ellipsometry. Multiple wavelengths are also used to characterize multilayers such as ONO, OPO, etc. with multiple results. Multiple wavelength ellipsometry is compared to multiple incidence angle ellipsometry. For multilayer stacks (transparent or absorbing) the SPI program was developed and is shown. In this program the known parameters as well as the to-be-measured parameters can be selected (substrate value, refractive index, k-value, thickness). Measurement spotsize effects are discussed--high lateral resolution measurements are presented.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years