Dr. Michael Tanksalvala Profile

Dr. Michael Tanksalvala

Researcher at National Institute of Standards and Technology

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Author

Publications (16)

Proceedings Article | 4 October 2024 Presentation + Paper

High frequency (>60GHz), atomic core-level spectroscopy using a high-harmonic generation light source

M. Tanksalvala, Anthony Kos, Jacob Wisser, Scott Diddams, Hans Nembach, Justin Shaw

Proceedings Volume 13119, 131190E (2024) https://doi.org/10.1117/12.3027829

KEYWORDS: Extreme ultraviolet, Microwave radiation, Magnetism, Ferromagnetics, Equipment, X-rays, Spectroscopes, Nickel, Spectroscopy, Oscilloscopes

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Proceedings Article | 10 April 2024 Presentation + Paper

EUV scatterometry: low-dose characterization of polymer-based metamaterials

Nicholas Jenkins, Yuka Esashi, Yunzhe Shao, Michael Tanksalvala, Henry Kapteyn, Margaret Murnane, Matthew Atkinson

Proceedings Volume 12955, 1295513 (2024) https://doi.org/10.1117/12.3009911

KEYWORDS: Extreme ultraviolet, Polymers, Diffraction, Scatterometry, Reflectometry, Metamaterials, Scanning transmission electron microscopy, Biological samples, Charge-coupled devices, Statistical modeling

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Proceedings Article | 30 April 2023 Presentation

High-fidelity actinic ptychographic imaging of EUV photomasks enabled by illumination engineering

Bin Wang, Nathan Brooks, Iona Binnie, Michael Tanksalvala, Yuka Esashi, Nicholas Jenkins, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12496, 124960A (2023) https://doi.org/10.1117/12.2670528

KEYWORDS: Metrology, Light sources, Extreme ultraviolet, Photomasks, Illumination engineering, Diffraction, Signal processing, Phase shift keying, Light sources and illumination, Beam divergence

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Proceedings Article | 27 April 2023 Presentation + Paper

Multi-modal tabletop EUV reflectometry for characterization of nanostructures

Yuka Esashi, Nicholas Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua Knobloch, Henry Kapteyn, Margaret Murnane

Proceedings Volume 12496, 1249614 (2023) https://doi.org/10.1117/12.2658543

KEYWORDS: Reflectometry, Extreme ultraviolet, Nanostructures, Diffraction, Surface roughness, Metrology, Phase retrieval, High harmonic generation, Chemical composition

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Proceedings Article | 1 December 2022 Presentation + Paper

Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

Bin Wang, Nathan Brooks, Michael Tanksalvala, Yuka Esashi, Nicolas Jenkins, Peter Johnsen, Iona Binnie, Guan Gui, YunZhe Shao, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726

KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

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Proceedings Article | 13 June 2022 Presentation

Towards shot-noise-limited EUV reflectometry: in a tabletop coherent EUV microscope

Nicholas Jenkins, Michael Tanksalvala, Yuka Esashi, Henry Kapteyn, Margaret Murnane

Proceedings Volume PC12053, PC1205306 (2022) https://doi.org/10.1117/12.2612098

KEYWORDS: Reflectometry, Extreme ultraviolet, Beam splitters, Tolerancing, Silicon, Semiconductors, Metrology, Cameras, CCD image sensors, CCD cameras

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Proceedings Article | 22 February 2021 Presentation + Paper

A new metrology technique for defect inspection via coherent Fourier scatterometry using orbital angular momentum beams

Bin Wang, Michael Tanksalvala, Zhe Zhang, Yuka Esashi, Nicholas Jenkins, Margaret Murnane, Henry Kapteyn, Chen-Ting Liao

Proceedings Volume 11611, 116110L (2021) https://doi.org/10.1117/12.2584728

KEYWORDS: Scatterometry, Defect inspection, Metrology, Model-based design, Defect detection, Cameras, Signal to noise ratio, Sensors, Extreme ultraviolet, X-rays

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Proceedings Article | 26 March 2019 Presentation

Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala, Christina Porter, Yuka Esashi, Galen Miley, Robert Karl, Peter Johnsen, Nicholas Jenkins, Charles Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth Cousin, Daniel Adams, Michael Gerrity, Henry Kapteyn, Margaret Murnane.

Proceedings Volume 10959, 109590G (2019) https://doi.org/10.1117/12.2516827

KEYWORDS: Extreme ultraviolet, Stereoscopy, Reflectometry, 3D image processing

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Proceedings Article | 26 March 2019 Presentation

Progress on sub-wavelength nanoimaging with a coherent tabletop EUV source (Conference Presentation)

Charles Bevis, Robert Karl, Bin Wang, Peter Johnsen, Michael Tanksalvala, Christina Porter, Yuka Esashi, Henry Kapteyn

Proceedings Volume 10959, 109590W (2019) https://doi.org/10.1117/12.2517026

KEYWORDS: Nanoimaging, Extreme ultraviolet

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Proceedings Article | 13 March 2018 Paper

Complex EUV imaging reflectometry: spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

Christina Porter, Michael Tanksalvala, Michael Gerrity, Galen Miley, Yuka Esashi, Naoto Horiguchi, Xiaoshi Zhang, Charles Bevis, Robert Karl, Peter Johnsen, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850M (2018) https://doi.org/10.1117/12.2297464

KEYWORDS: Reflectometry, Reflectivity, Extreme ultraviolet, Silicon, Coherence imaging, Cameras, Stereoscopy, 3D image processing, 3D metrology, Profiling

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Proceedings Article | 13 March 2018 Paper

Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

Charles Bevis, Robert Karl, Bin Wang, Yuka Esashi, Michael Tanksalvala, Christina Porter, Peter Johnsen, Daniel Adams, Margaret Murnane, Henry Kapteyn

Proceedings Volume 10585, 105852O (2018) https://doi.org/10.1117/12.2307861

KEYWORDS: Coherence imaging, Extreme ultraviolet, Extreme ultraviolet lithography, Pellicles, Photomasks, Imaging systems, Metrology, Wafer-level optics, Reflectivity, Semiconducting wafers

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Proceedings Article | 13 March 2018 Presentation + Paper

Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources

Robert Karl, Joshua Knobloch, Travis Frazer, Michael Tanksalvala, Christina Porter, Charles Bevis, Weilun Chao, Begoña Abad Mayor, Daniel Adams, Giulia Mancini, Jorge Hernandez-Charpak, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850N (2018) https://doi.org/10.1117/12.2297223

KEYWORDS: Acoustics, Extreme ultraviolet, Nanostructures, Diffraction, Coherence imaging, Nickel, Thin films, Wave propagation, Silicon, Nanostructuring

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Proceedings Article | 28 March 2017 Paper

Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

Michael Tanksalvala, Christina Porter, Dennis Gardner, Michael Gerrity, Giulia Mancini, Xiaoshi Zhang, Galen Miley, Elisabeth Shanblatt, Benjamin Galloway, Charles Bevis, Robert Karl, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10145, 101450L (2017) https://doi.org/10.1117/12.2271386

KEYWORDS: Diffraction, Sensors, Extreme ultraviolet, Reconstruction algorithms, Image resolution, Mirrors, Spatial resolution, Image transmission, Microscopes, Detection and tracking algorithms

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Proceedings Article | 30 September 2016 Presentation + Paper

Multiple beam ptychography for large field of view imaging

Charles Bevis, Robert Karl, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Proceedings Volume 9948, 99480U (2016) https://doi.org/10.1117/12.2236242

KEYWORDS: Coherence imaging, Image resolution, Diffraction, Sensors, Imaging systems, X-ray imaging, X-rays, Data acquisition, Microscopes, Extreme ultraviolet

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Proceedings Article | 21 April 2016 Paper

Multiple beam ptychography

Robert Karl, Charles Bevis, Raymond Lopez-Rios, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Proceedings Volume 9778, 97780F (2016) https://doi.org/10.1117/12.2220416

KEYWORDS: Polarization, Spectroscopy, Coherence imaging, Laser beam diagnostics, Deconvolution, Reconstruction algorithms, Metrology, Spatial filters, Diffraction gratings, Wave propagation

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Proceedings Article | 21 April 2016 Paper

Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination

Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Giulia Mancini, Robert Karl, Michael Tanksalvala, Charles Bevis, Henry Kapteyn, Margaret Murnane, Daniel Adams

Proceedings Volume 9778, 97780J (2016) https://doi.org/10.1117/12.2220368

KEYWORDS: Extreme ultraviolet, Coherence imaging, Microscopy, Spectroscopy, High harmonic generation, Overlay metrology, Imaging spectroscopy, Mirrors, Interfaces

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Showing 5 of 16 publications

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