Dr. Michael Wildenhain Profile

Dr. Michael Wildenhain

at Fraunhofer-Institut für Photonische Mikrosysteme

SPIE Involvement:

Author

Publications (16)

SPIE Journal Paper | 8 January 2022 Open Access

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors

Thilo Sandner, Thomas Graßhoff, Wolf-Dietrich Owe, Andreas Herrmann, Michael Wildenhain, Markus Schwarzenberg, Jan Grahmann

JOM, Vol. 2, Issue 01, 011004, (January 2022) https://doi.org/10.1117/12.10.1117/1.JOM.2.1.011004

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, LIDAR, System integration, Distance measurement, Receivers, 3D-TOF imaging, Sensors, Laser scanners

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 28 February 2020 Paper

System integration of hybrid large aperture micro scanner array for fast scanning LiDAR sensors

Thilo Sandner, Thomas Graßhoff, Wolf-Dietrich Owe, Andreas Herrmann, Michael Wildenhain, Markus Schwarzenberg

Proceedings Volume 11293, 112930Z (2020) https://doi.org/10.1117/12.2566185

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, LIDAR, Distance measurement, Sensors, Receivers, 3D-TOF imaging, Laser scanners, Cameras

Read Abstract +

Proceedings Article | 25 March 2015 Paper

Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera

Thilo Sandner, Claudia Baulig, Thomas Grasshoff, Michael Wildenhain, Markus Schwarzenberg, Hans-Georg Dahlmann, Stefan Schwarzer

Proceedings Volume 9375, 937505 (2015) https://doi.org/10.1117/12.2076440

KEYWORDS: Mirrors, Microelectromechanical systems, Scanners, Stereoscopic cameras, Distance measurement, Laser scanners, 3D-TOF imaging, Cameras, Sensors, Receivers

Read Abstract +

Proceedings Article | 16 February 2012 Paper

Optical position feedback for electrostatically driven MOEMS scanners

A. Tortschanoff, M. Baumgart, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 8252, 82520S (2012) https://doi.org/10.1117/12.907761

KEYWORDS: Mirrors, Microopto electromechanical systems, Diodes, Scanners, Sensors, Photodiodes, Microelectromechanical systems, Photodetectors, Error analysis, Motion measurement

Read Abstract +

Proceedings Article | 16 February 2012 Paper

Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head

Jan Grahmann, Michael Wildenhain, Thomas Grasshoff, Christian Gerwig, Hans-Georg Dallmann, Alexander Wolter, Harald Schenk

Proceedings Volume 8252, 825205 (2012) https://doi.org/10.1117/12.910671

KEYWORDS: Mirrors, Head, Distortion, Micromirrors, Scanners, Projection systems, Video processing, Manufacturing, RGB color model, Video

Read Abstract +

SPIE Journal Paper | 1 July 2011

Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

Andreas Tortschanoff, Albert Frank, Michael Wildenhain, Thilo Sandner, Andreas Kenda

JM3, Vol. 10, Issue 03, 033006, (July 2011) https://doi.org/10.1117/12.10.1117/1.3609230

KEYWORDS: Mirrors, Microopto electromechanical systems, Control systems, Scanners, Computer programming, Diodes, Electronics, Sensors, Photodiodes, Microelectromechanical systems

Read Abstract +

Proceedings Article | 5 May 2011 Paper

Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, A. Kenda

Proceedings Volume 8066, 80660O (2011) https://doi.org/10.1117/12.886481

KEYWORDS: Mirrors, Microelectromechanical systems, Diodes, Electronics, Control systems, Scanners, Computer programming, Microopto electromechanical systems, Silicon, Photodiodes

Read Abstract +

Proceedings Article | 14 February 2011 Paper

Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners

A. Tortschanoff, A. Frank, M. Wildenhain, H. Tetikol, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 7930, 79300S (2011) https://doi.org/10.1117/12.873261

KEYWORDS: Mirrors, Microopto electromechanical systems, Electronics, Microelectromechanical systems, Scanners, Control systems, Photodiodes, Sensors, Digital signal processing, Diodes

Read Abstract +

Proceedings Article | 18 February 2010 Paper

Large aperture MEMS scanner module for 3D distance measurement

Thilo Sandner, Michael Wildenhain, Christian Gerwig, Harald Schenk, Sfefan Schwarzer, Harald Wölfelschneider

Proceedings Volume 7594, 75940D (2010) https://doi.org/10.1117/12.844926

KEYWORDS: Scanners, Mirrors, Microelectromechanical systems, LIDAR, 3D scanning, Laser scanners, Distance measurement, Optical components, Sensors, Receivers

Read Abstract +

Proceedings Article | 18 February 2010 Paper

Synchronized microscanner array for large aperture receiver optics of LIDAR systems

Thilo Sandner, Thomas Grasshoff, Michael Wildenhain, Harald Schenk

Proceedings Volume 7594, 75940C (2010) https://doi.org/10.1117/12.844923

KEYWORDS: Scanners, Mirrors, Microelectromechanical systems, LIDAR, 3D scanning, Laser scanners, Micromirrors, Distance measurement, Silicon, Optical components

Read Abstract +

Proceedings Article | 17 February 2010 Paper

Optical position feedback and phase control of MOEMS scanner mirrors

A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 7594, 75940K (2010) https://doi.org/10.1117/12.840629

KEYWORDS: Mirrors, Microopto electromechanical systems, Diodes, Temperature metrology, Electronics, Scanners, Feedback control, Control systems, Phase measurement, Optical sensing

Read Abstract +

Proceedings Article | 14 February 2007 Paper

AO SLM demonstration system and test bed

Michael Wildenhain, Jens Knobbe, Andreas Gehner, Michael Wagner, Hubert Lakner

Proceedings Volume 6467, 64670E (2007) https://doi.org/10.1117/12.702338

KEYWORDS: Modulation transfer functions, Adaptive optics, Spatial light modulators, Wavefronts, Mirrors, Microelectromechanical systems, Monochromatic aberrations, Spatial frequencies, Imaging systems, Micromirrors

Read Abstract +

Proceedings Article | 18 August 2005 Paper

MEMS phase former kit for high-resolution wavefront control

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Andreas Elgner, Harald Schenk

Proceedings Volume 5894, 58940H (2005) https://doi.org/10.1117/12.618326

KEYWORDS: Mirrors, Micromirrors, Wavefronts, Microelectromechanical systems, Adaptive optics, Computer programming, Phase shift keying, Control systems, Analog electronics, Human-machine interfaces

Read Abstract +

Proceedings Article | 20 January 2003 Paper

Improved vision by eye aberration correction using an active-matrix-addressed micromirror array

Andreas Gehner, Michael Wildenhain, Wolfgang Doleschal, Andreas Elgner, Harald Schenk, Hubert Lakner

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472902

KEYWORDS: Mirrors, Eye, Micromirrors, Adaptive optics, Wavefronts, Monochromatic aberrations, Analog electronics, Microopto electromechanical systems, Transistors, Capacitors

Read Abstract +

Proceedings Article | 2 October 2001 Paper

Active-matrix-addressed micromirror array for wavefront correction in adaptive optics

Andreas Gehner, Wolfgang Doleschal, Andreas Elgner, Reinhard Kauert, Detlef Kunze, Michael Wildenhain

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443095

KEYWORDS: Mirrors, Micromirrors, Analog electronics, Wavefronts, Adaptive optics, Electrodes, Transistors, Optical calibration, Finite element methods, Chemical mechanical planarization

Read Abstract +

Proceedings Article | 22 August 2000 Paper

Micromirror arrays for wavefront correction

Andreas Gehner, Michael Wildenhain, Hubert Lakner

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396506

KEYWORDS: Mirrors, Adaptive optics, Analog electronics, Micromirrors, Wavefronts, Electrodes, Phase shifts, Photoresist materials, Electromechanical design, Actuators

Read Abstract +

Showing 5 of 16 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years