Dr. Michiteru Yamaura Profile

Dr. Michiteru Yamaura

at Osaka Univ

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 24 March 2006 Paper

Energy spectra and charge state of debris emitted from laser-produced minimum mass tin plasmas

Shinsuke Fujioka, Hiroaki Nishimura, Tsuyoshi Ando, Nobuyoshi Ueda, Shinichi Namba, Tatsuya Aota, Masakatsu Murakami, Katsunobu Nishihara, Young-G. Kang, Atsushi Sunahara, Hiroyuki Furukawa, Yoshinori Shimada, Kazuhisa Hashimoto, Michiteru Yamaura, Yuzuri Yasuda, Keiji Nagai, Takayoshi Norimatsu, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61513V (2006) https://doi.org/10.1117/12.656071

KEYWORDS: Plasmas, Tin, Ions, Extreme ultraviolet, Pulsed laser operation, Mirrors, Chemical species, Light sources, Opacity, Extreme ultraviolet lithography

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Proceedings Article | 23 March 2006 Paper

Progress in LPP EUV source development at Osaka University

Noriaki Miyanaga, Hiroaki Nishimura, Shinsuke Fujioka, Tatsuya Aota, Shigeaki Uchida, Michiteru Yamaura, Yoshinori Shimada, Kazuhisa Hashimoto, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Masakatsu Murakami, Vasilli Zhakhovskii, Young Kang, Atsushi Sunahara, Hiroyuki Furukawa, Akira Sasaki, Takeshi Nishikawa, Massahiro Nakatsuka, Hisanori Fujita, Koji Tsubakimoto, Hidetsugu Yoshida, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61511Q (2006) https://doi.org/10.1117/12.656555

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Pulsed laser operation, Ions, Nd:YAG lasers, Laser development, YAG lasers, Absorption, Opacity

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Proceedings Article | 6 May 2005 Paper

Properties of EUV and particle generations from laser-irradiated solid- and low-density tin targets

Shinsuke Fujioka, Hiroaki Nishimura, Tomoharu Okuno, Yezheng Tao, Nobuyoshi Ueda, Tsuyoshi Ando, Hiroto Kurayama, Yuzuri Yasuda, Shigeaki Uchida, Yoshinori Shimada, Michiteru Yamaura, Qincui Gu, Keiji Nagai, Takayoshi Norimatsu, Hiroyuki Furukawa, Atsushi Sunahara, Young-G. Kang, Masakatsu Murakami, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598692

KEYWORDS: Tin, Extreme ultraviolet, Plasmas, Ions, Opacity, Mirrors, EUV optics, Pulsed laser operation, Laser ablation, Particles

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Proceedings Article | 6 May 2005 Paper

Evaluation of tin-foil targets for debris mitigation in laser generated EUV source

Michiteru Yamaura, Shigeaki Uchida, Susumu Takemoto, Yoshinori Shimada, Hiroaki Nishimura, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Chiyoe Yamanaka

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599155

KEYWORDS: Extreme ultraviolet, Ions, Tin, Plasmas, Nd:YAG lasers, Cameras, Pulsed laser operation, Xenon, Particles, Foam

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Proceedings Article | 20 September 2004 Paper

Dependence of EUV emission properties on laser wavelength

Michiteru Yamaura, Shigeaki Uchida, Atsushi Sunahara, Yoshinori Shimada, Kazuhisa Hashimoto, Chiyoe Yamanaka, Keisuke Shigemori, Shinsuke Fujioka, Tomoharu Okuno, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.557207

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Laser applications, Optical simulations, Opacity, Lithography, Excimer lasers, Laser energy, Absorption

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Proceedings Article | 20 May 2004 Paper

Properties of EUV emissions from laserproduced tin plasmas

Yoshinori Shimada, Hiroaki Nishimura, Kazuhisa Hashimoto, Michiteru Yamaura, Keisuke Shigemori, Mitsuo Nakai, Shinsuke Fujioka, Shigeaki Uchida, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Keiji Nagai, Takayoshi Norimatsu, Toru Kawamura, Atsushi Sunahara, Katsunobu Nishihara, Noriaki Miyanaga, Masahiro Nakatsuka, Yasukazu Izawa, Chihiro Yamanaka

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534959

KEYWORDS: Extreme ultraviolet, Tin, Plasmas, Spectroscopy, Spherical lenses, Laser applications, Lithography, Grazing incidence, Laser energy, Calibration

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Proceedings Article | 20 May 2004 Paper

Estimation of emission efficiency for laser-produced EUV plasmas

Toru Kawamura, Atsushi Sunahara, Kouhei Gamada, Kazumi Fujima, Fumihiro Koike, Hiroyuki Furukawa, Takeshi Nishikawa, Akira Sasaki, Takashi Kagawa, Richard More, Takako Kato, Masakatsu Murakami, Vasillii Zhakhovskii, Hajime Tanuma, Takashi Fujimoto, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shigeaki Uchida, Chiyoe Yamanaka, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Mitsuo Nakai, Keisuke Shigemori, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535031

KEYWORDS: Extreme ultraviolet, X-rays, Plasmas, Tin, Electrons, Ions, Opacity, Laser development, Solids, Pulsed laser operation

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Proceedings Article | 20 May 2004 Paper

Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility

Keisuke Shigemori, Mitsuo Nakai, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shinsuke Fujioka, Hiroaki Nishimura, Shigeaki Uchida, Atsushi Sunahara, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.533918

KEYWORDS: Extreme ultraviolet, Plasmas, Opacity, Tin, X-rays, Laser ablation, Aluminum, Pulsed laser operation, Optical filters, Laser irradiation

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Proceedings Article | 7 January 2004 Paper

Study on EUV emission properties of laser-produced plasma at ILE, Osaka

Mitsuo Nakai, Hiroaki Nishimura, Keisuke Shigemori, Noriaki Miyanaga, Takayoshi Norimatsu, Keiji Nagai, Ryoji Matsui, Takehiro Hibino, Tomoharu Okuno, F. Sohbatzadeh, Y. Tao, Kazuhisa Hashimoto, Michiteru Yamaura, Shinsuke Fujioka, Hideo Nagatomo, Vasilii Zhakhovskii, Katsunobu Nishihara, Shigeaki Uchida, Yoshinori Shimada, Hiroyuki Furukawa, Masahiro Nakatsuka, Yasukazu Izawa

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.504166

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Opacity, X-rays, Spherical lenses, Laser ablation, Data modeling, Laser systems engineering, Laser applications

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Proceedings Article | 11 January 2000 Paper

Characteristics of a laser-triggered discharge by high-repetition-rate excimer laser on dc electric field

Michiteru Yamaura, Satoshi Ihara, Saburoh Satoh, Chobei Yamabe

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375111

KEYWORDS: Excimer lasers, Oxygen, Gases, Nitrogen, Ultraviolet radiation, Laser irradiation, Electrodes, Plasma, Ions, Particles

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Showing 5 of 10 publications

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