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Min Lei
at Huazhong Univ of Science & Technology
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Publications (1)
Proceedings Article | 31 March 2014 Paper
A temperature control algorithm of immersion liquid for immersion lithography
Junwei He, Xiaoping Li, Min Lei, Bing Chen, Jinchun Wang
Proceedings Volume 9052, 90522F (2014) https://doi.org/10.1117/12.2046080
KEYWORDS: Liquids, Control systems, Fuzzy logic, Immersion lithography, Temperature metrology, Sensors, Photonic integrated circuits, Water, Control systems design, Process control
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