Ms. Min Wang Profile

Min Wang

at Shanghai Huali Integrated Circuit Corp

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Publications (1)

Proceedings Article | 23 March 2020 Paper

VIA design optimization for fast yield ramping in advanced nodes

Min Wang, Yizhong Zhang, Shirui Yu, Xinyi Hu, Qijian Wan, Zhengfang Liu, Zhixi Chen, Chunshan Du

Proceedings Volume 11328, 1132814 (2020) https://doi.org/10.1117/12.2551683

KEYWORDS: Metals, Design for manufacturing, Manufacturing, Particles, Yield improvement, Design for manufacturability, Roads, Polishing, Photomasks, Integrated circuit design

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