Mr. Ming Yun Chen Profile

Ming Yun Chen

at Synopsys Taiwan Co Ltd

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Publications (2)

Proceedings Article | 16 September 2022 Paper

Mask modeling in the curvilinear era

Alex Zepka, Ming Yun Chen

Proceedings Volume 12325, 123250A (2022) https://doi.org/10.1117/12.2642161

KEYWORDS: Photomasks, Data modeling, Calibration, Optical proximity correction, Metrology, Lithography, Optimization (mathematics), Manufacturing

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Proceedings Article | 23 March 2020 Paper

EUV OPC methodology for beyond 20nm memory cell by simulation data

Jiunhau Fu, Chiang Lin Shih, Chun Cheng Liao, Eric Huang, Elsley Tan, John Tsai, Ming Yun Chen, Yuan Pin Liao, Seung Hee Baek

Proceedings Volume 11323, 113232H (2020) https://doi.org/10.1117/12.2551669

KEYWORDS: Optical proximity correction, Extreme ultraviolet, Molybdenum, Photomasks, Data modeling, Critical dimension metrology, Source mask optimization, Semiconducting wafers, EUV optics, Array processing

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