Prof. Mingjun Chen Profile

Prof. Mingjun Chen

at Harbin Institute of Technology

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 20 November 2024 Paper

Intelligent inspection system framework for surface damage mitigation of large-aperture optics

Zhaoyang Yin, Linjie Zhao, Tianyuan Li, Tianhao Zhang, Jian Cheng, Mingjun Chen

Proceedings Volume 13241, 132410F (2024) https://doi.org/10.1117/12.3036079

KEYWORDS: Inspection, Optical surfaces, Control systems, Automatic control, Intelligence systems, Decision making

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Micron-level surface damages can seriously affect the optical and mechanical properties of large-aperture optics, so it is of great significance to perform high-precision inspection and mitigation of surface damages. Surface micro-damages are not only multi-category but also randomly distributed on the optics. Manual inspection and mitigation are not only time-consuming but also difficult to ensure the accuracy and reliability of mitigation, so it cannot meet the engineering requirements for large-volume mitigation of optics. In order to solve this problem, an intelligent inspection system framework for optics surface damage mitigation is proposed in this paper. The inspection system consists of an optics surface ranging fitting module, a dark-field rapid inspection module, and a multi-illumination micro-inspection module. Based on the above modules, a damage inspection process flow is established, including automatic alignment of optics surface, rapid dark-field inspection of flaws with large field of view, microscopic precision inspection of damages with small field of view, automatic configuration and execution of damage mitigation strategies, and quality control of mitigation structure. In order to realize the above flow, a predictive model library related to damage inspection is constructed, including: a dark field classification and size calibration model, a microscopy multi-classification model, and a mitigation quality inspection model. The automation and intelligence of the process flow is achieved by replacing the manual decision-making process with predictions from the model library. Based on the proposed framework, the working principle and workflow of the damage intelligent inspection system are explained, and the inspection efficiency and automation level of the system are evaluated in this paper. The intelligent inspection system framework proposed in this paper can provide technical support for future high-volume mitigation of large-aperture optics.

Proceedings Article | 8 November 2024 Paper

Investigation on laser annealing mechanism of fused silica optics polished by CO2 lasers based on fictive temperature distribution

Tianhao Zhang, Linjie Zhao, Mingjun Chen, Jian Cheng, Zhaoyang Yin, Tianyuan Li

Proceedings Volume 13234, 132340J (2024) https://doi.org/10.1117/12.3035062

KEYWORDS: Annealing, Silica, Polishing, Laser processing, Carbon dioxide lasers

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Proceedings Article | 29 December 2023 Paper

A study on surface finish of SiCp/Al composites machining

Zhigao Chen, Bo Wang, Fei Ding, Qiuyan Liao, Jiadai Xue, Kaiji Wu, Yuxin Fan, Qinghui Zhang, Mingjun Chen

Proceedings Volume 12976, 129760V (2023) https://doi.org/10.1117/12.3008595

KEYWORDS: Composites, Mirror surfaces, Surface finishing, Materials processing, Materials properties

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Proceedings Article | 19 November 2021 Poster + Paper

Surface damage evolution of KDP crystals induced by conical cracks under irradiation of nanosecond laser

Wenyu Ding, Mingjun Chen, Jian Cheng, Hao Yang, Linjie Zhao, Qi Liu, Zhichao Liu

Proceedings Volume 11910, 119101U (2021) https://doi.org/10.1117/12.2618820

KEYWORDS: Crystals, Laser induced damage, Laser crystals, Laser irradiation

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Proceedings Article | 19 November 2021 Poster + Paper

Investigation on the influence of the CO2 laser parameters on the defect healing process of fused silica

Zican YANG, Hongguang Xu, Jian Cheng, Linjie Zhao, Mingjun Chen, Jinghe Wang, Chao Tan, Yaguo LI, Zhichao Liu

Proceedings Volume 11910, 119101V (2021) https://doi.org/10.1117/12.2618826

KEYWORDS: Silica, Carbon dioxide lasers, Surface finishing, Laser processing, Optics manufacturing, Laser irradiation, Thermal modeling, Temperature metrology

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Proceedings Article | 8 July 2019 Paper

Transient dynamic behavior during nanosecond laser-induced damage initiated by surface defects on KDP crystals with simulation and experimental method

Hao Yang, Jian Cheng, Zhichao Liu, Qi Liu, Linjie Zhao, Jian Wang, Mingjun Chen

Proceedings Volume 11063, 110630K (2019) https://doi.org/10.1117/12.2540166

KEYWORDS: Laser induced damage, Crystals, Laser crystals, Optical simulations, Laser irradiation, Fluid dynamics, Plasma, Absorption, Manufacturing, Microfluidics

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Proceedings Article | 24 January 2019 Paper

Downstream light intensification induced by Gaussian mitigation pits using micro-milling on rear KDP surface

Hao Yang, Jian Cheng, Mingjun Chen, Qi Liu, Zhichao Liu, Jian Wang, Qiao Xu

Proceedings Volume 10840, 108400W (2019) https://doi.org/10.1117/12.2504919

KEYWORDS: Modulation, Crystals, Diffraction, Laser induced damage, Optical components, Laser crystals, Micro cutting, Micromachining, Near field diffraction, High power lasers

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Proceedings Article | 13 November 2017 Paper

Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal

Jian Cheng, Hao Yang, Qi Liu, Mingjun Chen, Wenjing Ma, Jiubin Tan, Chenhui An, Zhichao Liu

Proceedings Volume 10447, 104471L (2017) https://doi.org/10.1117/12.2280519

KEYWORDS: Laser induced damage, Crystals, Spherical lenses, Near field optics, Micro cutting, Resistance, Laser crystals, Near field, Crystal optics, Surface roughness

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Proceedings Article | 27 December 2001 Paper

Ultraprecision grinding machining of optical aspheric surface in ductile mode

Mingjun Chen, Feihu Zhang, Qingliang Zhao, Shen Dong

Proceedings Volume 4451, (2001) https://doi.org/10.1117/12.453646

KEYWORDS: Aspheric lenses, Surface roughness, Glasses, Analytical research, Surface finishing, Diamond wheels, Microfluidics, Error analysis, Diamond machining, Factor analysis

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