Dr. Minkang Li Profile

Dr. Minkang Li

at Shanghai Institute of Optics and Fine Mechanics

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Author

Publications (7)

Proceedings Article | 8 November 2018 Paper

Orthogonal crossed gratings fabricated by scanning Dammann lithography

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Xiansong Xiang, Shiyao Zhu, Fantao Bu, Yunkai Lu

Proceedings Volume 10818, 108180V (2018) https://doi.org/10.1117/12.2500281

KEYWORDS: Lithography, Interferometers, Photoresist materials, Optical encoders, Diffraction gratings, Mirrors, Atomic force microscopy, Laser applications, Photomasks, Lutetium

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Proceedings Article | 8 November 2018 Paper

The fabrication and measurement of gold reflective grating

Fantao Bu, Yunkai Lu, Changhe Zhou, Minkang Li, Yingjie Yu

Proceedings Volume 10818, 1081810 (2018) https://doi.org/10.1117/12.2500811

KEYWORDS: Diffraction gratings, Diffraction, Laser applications, Polarization, Gold, Reflectivity, Lithography, Power meters, Laser development, Photomasks

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Proceedings Article | 6 November 2018 Paper

Grating interferometry with high optical subdivision

Shiyao Zhu, Changhe Zhou, Minkang Li, Chunlong Wei, Junjie Yu

Proceedings Volume 10818, 108181O (2018) https://doi.org/10.1117/12.2500576

KEYWORDS: Interferometers, Diffraction gratings, Diffraction, Mirrors, Doppler effect, Interferometry, Laser sources, Distance measurement, Laser stabilization, Photodetectors

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Proceedings Article | 6 November 2018 Paper

Gratings theory for pico-optics applications

Changhe Zhou, Minkang Li, Xiansong Xiang, Chunlong Wei, Wei Jia, Changcheng Xiang

Proceedings Volume 10818, 108180G (2018) https://doi.org/10.1117/12.2500319

KEYWORDS: Interferometers, Wavefronts, Holography, Diffraction gratings, Sensors, Distortion, Optical components, Nano optics, Distance measurement, Diffraction

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Proceedings Article | 31 October 2016 Paper

Interference pattern period measurement at picometer level

Xiansong Xiang, Chunlong Wei, Wei Jia, Changhe Zhou, Minkang Li, Yancong Lu

Proceedings Volume 10022, 100220Z (2016) https://doi.org/10.1117/12.2245946

KEYWORDS: Data analysis, Error analysis, Lithography, Interferometers, Electronic filtering, Beam splitters, Sensors, Signal detection, Mirrors, Signal processing

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Proceedings Article | 31 October 2016 Paper

Study of a grating interferometer with high optical subdivision technique

Yancong Lu, Changhe Zhou, Shubin Li, Chunlong Wei, Minkang Li, Xiansong Xiang, Jili Deng, Changcheng Xiang, Wei Jia, Junjie Yu, Jin Wang, Chao Li

Proceedings Volume 10022, 1002214 (2016) https://doi.org/10.1117/12.2246091

KEYWORDS: Interferometers, Diffraction gratings, Prisms, Environmental sensing, Mirrors, Geometrical optics, Signal processing, Interferometry, Light sources, Beam splitters

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Proceedings Article | 31 October 2016 Paper

Image grating metrology using phase-stepping interferometry in scanning beam interference lithography

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Yancong Lu, Changcheng Xiang, XianSong Xiang

Proceedings Volume 10022, 1002212 (2016) https://doi.org/10.1117/12.2245330

KEYWORDS: Phase interferometry, Image fusion, Interferometry, Lithography, Interferometers, Metrology, Wavefronts, Phase shifts, Phase shifting, Distortion

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Showing 5 of 7 publications

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