Mr. Zhichang Mo Profile

Zhichang Mo

at Shanghai Institute of Optics and Fine Mechanics

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Publications (2)

Proceedings Article | 1 November 2021 Paper

Defocusing detection based on asymmetric placement of dual-quadrant detector

Jinlun Zheng, Xing Liu, Guodong Chen, Zhengwei Wang, Lu Wang, Tianyu Gao, Zhichang Mo, Jingsong Wei

Proceedings Volume 12057, 120572E (2021) https://doi.org/10.1117/12.2605876

KEYWORDS: Sensors, Signal detection, Objectives, Error analysis, Monochromatic aberrations, Lithography, Ferroelectric materials, Optical imaging, Wave plates, Shape analysis

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Proceedings Article | 6 June 2021 Paper

Miniature image preservation in stack structure

Zhichang Zhi-chang, Jinlun Zheng, Zhengwei Wang, Guodong Chen, Kui Zhang, Lu Wang, Qing Cao, Jingsong Wei

Proceedings Volume 11849, 118490A (2021) https://doi.org/10.1117/12.2598238

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