We present recent advancements in the Optical Metrology Laboratory (OML) at Diamond Light Source. Improvements in optical manufacturing technology, and demands from beamlines at synchrotron and free electron laser facilities, have made it a necessity to routinely characterize X-ray mirrors with slope errors < 100 nrad rms. The Diamond-NOM profiler can measure large, fully assembled optical systems in a sideways, upwards, or downwards facing geometry. Examples are provided of how it has recently characterized several challenging systems, including: actively bent mirrors; clamped monochromator gratings in a downward-facing geometry; and four, state-of-the-art, elliptically bent, long mirrors with slope errors < 100 nrad rms. The NOM’s components and data analysis procedures are continuously updated to stay ahead of the ever-increasing quality of X-ray optics and opto-mechanics. The OML’s newest instrument is a Zygo HDX 6” Fizeau interferometer. A dedicated support frame and motorized translation and rotation stages enable sub-aperture images to be stitched together using in-house controls and automation software. Cross-comparison of metrology data, including as part of the MooNpics collaboration, provides a valuable insight into the nature of optical defects and helps to push optical fabrication to a new level of quality.
A new metrology and assembly facility was constructed at CNPEM and turned recently into operation. The facility includes an assembly area of 100 m2, a high-precision mechanical metrology laboratory and an optical metrology laboratory (OML), both of 50 m2, and provide improved environmental and instrumental conditions. All three laboratories sit on inertial blocks with special foundations originally developed and tested as prototype for the SIRIUS tunnel floor. The inertial blocks perform very well in attenuation of external vibrations. The OML is cleanroom ISO7 and has temperature stability better than ±0.1 K. Measurements of the surface under test (SUT) using NOM, Fizeau- Interferometer (FI), Micro-Interferometer (MI) and AFM as the four instruments inside the OML cover the full required range of spatial frequencies. We report on the performance of the NOM and FI, the first instruments installed in the OML.
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