Dr. Najmeh Abbasirad Profile

Dr. Najmeh Abbasirad

at Physikalische-Technische Bundesanstalt (PTB)

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Publications (3)

Proceedings Article | 4 October 2023 Presentation

Investigating the sensitivity of optical constant determination in the vacuum ultraviolet spectral range to s- and p-polarized reflectance

Najmeh Abbasirad, Udo Kroth, Qais Saadeh, Richard Ciesielski, Alexander Gottwald, Vicky Philipsen, Frank Scholze, Victor Soltwisch, Mattia Mulazzi

Proceedings Volume PC12695, PC1269507 (2023) https://doi.org/10.1117/12.2681821

KEYWORDS: Vacuum ultraviolet, Reflectivity, Refractive index, Reflectance spectroscopy, Polarization, Absorption, Thin films, Spectroscopy, Semiconductors, Semiconductor manufacturing

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Proceedings Article | 27 April 2023 Paper

Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range

Najmeh Abbasirad, Qais Saadeh, Richard Ciesielski, Alexander Gottwald, Vicky Philippsen, Igor Makhotkin, Andrey Sokolov, Michael Kolbe, Frank Scholze, Victor Soltwisch

Proceedings Volume 12496, 124963B (2023) https://doi.org/10.1117/12.2659369

KEYWORDS: Optical constants, Vacuum ultraviolet, Ruthenium, Extreme ultraviolet, X-rays, Thin films, Reflectometry, Monte Carlo methods, Film thickness

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Proceedings Article | 27 April 2023 Presentation + Paper

Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

Richard Ciesielski, Leonhard Lohr, Hans Mertens, Anne-Laure Charley, Rudi de Ruyter, Janusz Bogdanowicz, Philipp Hönicke, Najmeh Abbasirad, Victor Soltwisch

Proceedings Volume 12496, 124961M (2023) https://doi.org/10.1117/12.2658501

KEYWORDS: Extreme ultraviolet, Scatterometry, Data modeling, Diffraction, Nanostructures, X-rays, Finite element methods, Scattering

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