Dr. Nanshu Chen Profile

Dr. Nanshu Chen

Principle Engineer at GlobalFoundries

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Publications (2)

Proceedings Article | 23 March 2011 Paper

Optimizing OPC data sampling based on "orthogonal vector space"

Yuyang Sun, Yee Mei Foong, Yingfang Wang, Jacky Cheng, Dongqing Zhang, Shaowen Gao, Nanshu Chen, Byoung Il Choi, Antoine Bruguier, Mu Feng, Jianhong Qiu, Stefan Hunsche, Liang Liu, Wenjin Shao

Proceedings Volume 7973, 79732K (2011) https://doi.org/10.1117/12.881575

KEYWORDS: Data modeling, Vector spaces, Calibration, Optical proximity correction, Semiconducting wafers, Statistical modeling, Metrology, Time metrology, Process modeling, Image analysis

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Proceedings Article | 21 March 2007 Paper

Hardware verification of litho-friendly design (LfD) methodologies

Reinhard März, Kai Peter, Sonja Gröndahl, Klaus Keiner, Byoung Il Choi, Shyue Fong Quek, Mei Chun Yeo, Nan Shu Chen, Soo Muay Goh

Proceedings Volume 6521, 65210M (2007) https://doi.org/10.1117/12.713995

KEYWORDS: Calibration, Process modeling, Lithography, Resolution enhancement technologies, Design for manufacturing, Semiconducting wafers, Prototyping, 3D modeling, Scanning electron microscopy, Printing

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