CONFERENCE PROCEEDINGS
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Naoto Mochizuki
at Tokuyama Corp
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 28 November 2011 Paper
Potential of large diameter MgF2 single crystal grown by Czochralski method
Proceedings Volume 8190, 819015 (2011) https://doi.org/10.1117/12.899103
KEYWORDS: Crystals, Magnesium fluoride, Metals, Transmittance, Quartz, Absorption, Laser irradiation, Lithography, Color centers, Vacuum ultraviolet
Proceedings Article | 31 December 2009 Paper
Development of large size MgF2 single crystal grown by the CZ method
Proceedings Volume 7504, 75041Q (2009) https://doi.org/10.1117/12.836349
KEYWORDS: Crystals, Magnesium fluoride, Transmittance, Vacuum ultraviolet, Laser crystals, Polarizers, Transparency, Crystal optics, Laser irradiation, Single crystal X-ray diffraction
Proceedings Article | 7 March 2008 Paper
Fluoride single crystals for the next generation lithography
Teruhiko Nawata, Yoji Inui, Toshiro Mabuchi, Naoto Mochizuki, Isao Masada, Eiichi Nishijima, Hiroki Sato, Tsuguo Fukuda
Proceedings Volume 6924, 69242L (2008) https://doi.org/10.1117/12.771786
KEYWORDS: Crystals, Transmittance, Magnesium fluoride, Refractive index, Vacuum ultraviolet, Laser crystals, Lithography, Immersion lithography, Transparency, Crystallography
Proceedings Article | 27 March 2007 Paper
High-index fluoride materials for 193-nm immersion lithography
Teruhiko Nawata, Yoji Inui, Isao Masada, Eiichi Nishijima, Toshiro Mabuchi, Naoto Mochizuki, Hiroki Satoh, Tsuguo Fukuda
Proceedings Volume 6520, 65201P (2007) https://doi.org/10.1117/12.711045
KEYWORDS: Crystals, Transmittance, Laser induced fluorescence, Annealing, Refractive index, Immersion lithography, Transparency, Vacuum ultraviolet, Scattering, Excimer lasers
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