Natalya Yakunina
at National Research Univ of Electronic Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121570P (2022) https://doi.org/10.1117/12.2624365
KEYWORDS: Graphene, Etching, Oxides, Sensors, Ions, Electrodes, Ion beams, Resistance, Gas sensors, Silicon

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