Mr. Nathan Bartlett Profile

Nathan Bartlett

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Publications (7)

Proceedings Article | 10 April 2024 Poster

Measurement of tin diffusion coefficients through molecular hydrogen

Gordon Jameson Crouse, Andrew Herschberg, Nathan Bartlett, Niels Braaksma, David Ruzic

Proceedings Volume PC12953, PC1295312 (2024) https://doi.org/10.1117/12.3013100

KEYWORDS: Tin, Hydrogen, Diffusion, Pipes, Analytic models, Extreme ultraviolet, Vacuum chambers, Temperature metrology, Prototyping, Modeling

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Proceedings Article | 10 April 2024 Poster

Elastic and inelastic cross section of tin ions in an extreme ultraviolet lithography source

Nathan Bartlett, Andrew Herschberg, Jameson Crouse, Jake Nuttall, Linus Ringstad, Jack Granat, Niels Braaksma, David Ruzic

Proceedings Volume PC12953, PC1295310 (2024) https://doi.org/10.1117/12.3013047

KEYWORDS: Tin, Ions, Extreme ultraviolet lithography, Elasticity, Scattering, Hydrogen, Vacuum chambers, Quantum particles, Quantum experiments, Molecular interactions

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Proceedings Article | 10 April 2024 Poster

Plasma enhanced co oxidation in EUV drive lasers

Andrew Herschberg, Nathan Bartlett, Gordon Jameson Crouse, David Ruzic

Proceedings Volume PC12953, PC1295311 (2024) https://doi.org/10.1117/12.3013052

KEYWORDS: Carbon monoxide, Gas lasers, Plasma, Carbon dioxide, Oxidation, Extreme ultraviolet, Carbon dioxide lasers, Vacuum chambers, Photons, Molecules

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Proceedings Article | 28 April 2023 Poster + Paper

Scattering cross sections of tin ions with molecular hydrogen

Nathan Bartlett, Andrew Herschberg, Jameson Crouse, Raquel Garza, Raj Ganeson, Tamar Dallal, Jake Nuttall, Linus Ringstad, David Ruzic

Proceedings Volume 12494, 124941F (2023) https://doi.org/10.1117/12.2658352

KEYWORDS: Ions, Tin, Scattering, Hydrogen, Elasticity, Molecular interactions, Extreme ultraviolet, Plasma, Modeling

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Proceedings Article | 28 April 2023 Poster + Paper

Plasma enhanced CO2 recombination in EUV drive lasers

Andrew Herschberg, Nathan Bartlett, Jameson Crouse, David Ruzic

Proceedings Volume 12494, 124941D (2023) https://doi.org/10.1117/12.2664342

KEYWORDS: Carbon monoxide, Plasma, Gas lasers, Gold, Spectroscopy, Extreme ultraviolet lithography, Copper, Microwave radiation, Extreme ultraviolet, Carbon dioxide lasers

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Proceedings Article | 14 April 2023 Poster

Measurement of tin diffusion coefficients through molecular hydrogen

Gordon Jameson Crouse, Gavin McCoy, Nathan Bartlett, Andrew Herschberg

Proceedings Volume PC12494, PC124940O (2023) https://doi.org/10.1117/12.2663094

KEYWORDS: Tin, Hydrogen, Diffusion, Extreme ultraviolet, Temperature metrology, Prototyping, Extreme ultraviolet lithography

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Proceedings Article | 13 June 2022 Poster

Stopping a tin ion beam with a background gas and plasma

Jack Stahl, Nathan Bartlett, David Ruzic

Proceedings Volume PC12051, PC120510X (2022) https://doi.org/10.1117/12.2619381

KEYWORDS: Tin, Plasma, Ion beams, Ions, Plasma generation, Extreme ultraviolet, Signal attenuation, Semiconductor manufacturing, Semiconductor lasers, Optical testing

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Showing 5 of 7 publications

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