Ms. Ni Hu Profile

Ni Hu

at National Univ of Singapore

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Author

Publications (3)

Proceedings Article | 14 November 2007 Paper

Study on atmospheric transmittance of MODIS and FY

Ni Hu, Shihao Tang, Xiaowen Li

Proceedings Volume 6790, 67901H (2007) https://doi.org/10.1117/12.748904

KEYWORDS: Transmittance, MODIS, Atmospheric modeling, Carbon monoxide, Gases, Ozone, Oxygen, Methane, Atmospheric particles, Remote sensing

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Proceedings Article | 5 April 2007 Paper

Real-time spatial control of photoresist development rate

Arthur Tay, Weng-Khuen Ho, Ni Hu, Choon-Meng Kiew, Kuen-Yu Tsai

Proceedings Volume 6518, 65182N (2007) https://doi.org/10.1117/12.711509

KEYWORDS: Photoresist developing, Photoresist materials, Semiconducting wafers, Lithography, Spectrometers, Critical dimension metrology, Process control, Photoresist processing, Reflectivity, Integrated circuits

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Proceedings Article | 10 March 2006 Paper

Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography

Arthur Tay, Weng-Khuen Ho, Ni Hu, Kuen-Yu Tsai, Ying Zhou

Proceedings Volume 6155, 61550A (2006) https://doi.org/10.1117/12.654741

KEYWORDS: Semiconducting wafers, Optical lithography, Control systems, Thermal modeling, Resistance, Temperature sensors, Photoresist processing, Sensors, Process control, Critical dimension metrology

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