The fundamental sensitivity limit of an appropriately scaled down mechanical resonator can approach one atomic mass
unit when only thermal noise is present in the system. However, operation of such nanoscale mechanical resonators is
very challenging due to minuteness of their oscillation amplitudes and presence of multiple noise sources in real
experimental environments. In order to surmount these challenges, we use microscale cantilever resonators driven to
large amplitudes, far beyond their nonlinear instability onset. Our experiments show that such a nonlinear cantilever
resonator, described analytically as a Duffing oscillator, has mass sensing performance comparable to that of much
smaller resonators operating in a linear regime. We demonstrate femtogram level mass sensing that relies on a
bifurcation point tracking that does not require any complex readout means. Our approaches enable straightforward
detection of mass changes that are near the fundamental limit imposed by thermo-mechanical fluctuations.
A coded source imaging system has been developed to improve resolution for neutron radiography through magnification and demonstrated at the High Flux Isotope Reactor (HFIR) CG-1D instrument. Without magnification, the current resolution at CG-1D is 80μm using a charge-coupled device (CCD) equipped with a lens. As for all neutron imaging instruments, magnification is limited by a large source size. At CG-1D the size is currently limited to 12mm with a circular aperture. Coded source imaging converts this large aperture into a coded array of smaller apertures to achieve high resolution without the loss of flux for a single pinhole aperture, but requires a decoding step. The developed system has demonstrated first magnified radiographic imaging at magnifications as high as 25x using coded apertures with holes as small as 10μm. Such a development requires a team with a broad base of expertise including imaging systems design, neutron physics, microelectronics manufacturing methods, reconstruction algorithms, and high performance computing. The paper presents the system design, discusses implementation challenges, and presents imaging results.
KEYWORDS: Capacitors, Energy efficiency, Thermoelectric materials, Energy conversion efficiency, Pyroelectric materials, Temperature metrology, Energy harvesting, Instrument modeling, Thermal modeling, Dielectrics
Harvesting electrical energy from thermal energy sources using pyroelectric conversion techniques
has been under investigation for over 50 years, but it has not received the attention that thermoelectric energy
harvesting techniques have during this time period. This lack of interest stems from early studies which
found that the energy conversion efficiencies achievable using pyroelectric materials were several times less
than those potentially achievable with thermoelectrics. More recent modeling and experimental studies have
shown that pyroelectric techniques can be cost competitive with thermoelectrics and, using new temperature
cycling techniques, has the potential to be several times as efficient as thermoelectrics under comparable
operating conditions. This paper will review the recent history in this field and describe the techniques that
are being developed to increase the opportunities for pyroelectric energy harvesting.
The development of a new thermal energy harvester concept, based on temperature cycled
pyroelectric thermal-to-electrical energy conversion, are also outlined. The approach uses a resonantly
driven, pyroelectric capacitive bimorph cantilever structure that can be used to rapidly cycle the temperature
in the energy harvester. The device has been modeled using a finite element multi-physics based method,
where the effect of the structure material properties and system parameters on the frequency and magnitude of
temperature cycling, and the efficiency of energy recycling using the proposed structure, have been modeled.
Results show that thermal contact conductance and heat source temperature differences play key roles in
dominating the cantilever resonant frequency and efficiency of the energy conversion technique. This paper
outlines the modeling, fabrication and testing of cantilever and pyroelectric structures and single element
devices that demonstrate the potential of this technology for the development of high efficiency thermal-toelectrical
energy conversion devices.
We describe the design, fabrication and characterization of simple micromechanical structures that are capable of
sensing static electric time varying electromagnetic fields. Time varying electric field sensing is usually achieved using
an electromagnetic antenna and a receiver. However, these antenna-based approaches do not exhibit high sensitivity
over a broad frequency (or wavelength) range. An important aspect of the present work is that, in contrast to traditional
antennas, the dimensions of these micromechanical oscillators can be much smaller than the wavelength of the
electromagnetic wave. We characterized the fabricated micromechanical oscillators by measuring their responses to
time varying electric and electromagnetic fields.
KEYWORDS: Capacitors, Solar energy, Temperature metrology, Microelectromechanical systems, Energy efficiency, Energy conversion efficiency, Fabrication, Dielectrics, Computing systems, Thermal modeling
The efficient conversion of waste thermal energy into electrical energy is of considerable interest due to
the huge sources of low-grade thermal energy available in technologically advanced societies. Our group at the
Oak Ridge National Laboratory (ORNL) is developing a new type of high efficiency thermal waste heat energy
converter that can be used to actively cool electronic devices, concentrated photovoltaic solar cells, computers and
large waste heat producing systems, while generating electricity that can be used to power remote monitoring
sensor systems, or recycled to provide electrical power. The energy harvester is a temperature cycled pyroelectric
thermal-to-electrical energy harvester that can be used to generate electrical energy from thermal waste streams
with temperature gradients of only a few degrees. The approach uses a resonantly driven pyroelectric capacitive
bimorph cantilever structure that potentially has energy conversion efficiencies several times those of any
previously demonstrated pyroelectric or thermoelectric thermal energy harvesters. The goals of this effort are to
demonstrate the feasibility of fabricating high conversion efficiency MEMS based pyroelectric energy converters
that can be fabricated into scalable arrays using well known microscale fabrication techniques and materials.
These fabrication efforts are supported by detailed modeling studies of the pyroelectric energy converter
structures to demonstrate the energy conversion efficiencies and electrical energy generation capabilities of these
energy converters. This paper reports on the modeling, fabrication and testing of test structures and single
element devices that demonstrate the potential of this technology for the development of high efficiency thermal-to-electrical energy harvesters.
The sensor community has long been presented with the problem of prioritizing among several competing sensor system
variables due to the inability to produce a high confidence, low-cost, reliable, and compact device. Typically a solution
for very critical scenarios has been a high-cost scale reduction of larger laboratory based instrumentation. This often
produced data on a single parameter that is beyond reproach, however this can also produce a very delicate, bulky, and
costly system often requiring a vacuum system of some sort. An alternative approach involves using micro-electro-mechanical
systems (MEMS) based sensors. This typically results in low-cost and extremely compact devices that often
produce dubious or insufficient data. Our approach integrates multiple orthogonal stimuli within a single chip to produce
a MEMS based sensor that has a very high degree of signal confidence. Each individual sensed parameter may not
produce very high-confidence data, but the combination of multiple independent parameters significantly improves
detection reliability in a small low-cost package. In this work we address the integration of THz to our traditional
MEMS based IR sensor elements. Also it is very significant that we can now produce IR images at atmospheric
pressures which enables the integration of chemical and biological sensing within the same MEMS array.
MEMS thermal transducers offer a promising technological platform for uncooled IR imaging. We report on the fabrication and performance of a 256x256 MEMS IR FPA based on bimaterial microcantilever. The FPA readout is performed using a simple and efficient optical readout scheme. The response time of the bimaterial microcantilever was <15 ms and the thermal isolation was calculated to be < 4x10-7 W/K. Using these FPAs we obtained IR images of room temperature objects. Image quality is improved by automatic post-processing of artifacts arising from noise and non-responsive pixels. An iterative Curvelet denoising and inpainting procedure is successfully applied to image output. We present our results and discuss the factors that determine the ultimate performance of the FPA. One of the unique advantages of the present approach is the scalability to larger imaging arrays.
We report on the fabrication and characterization of microcantilever based uncooled focal plane array (FPA) for infrared imaging. By combining a streamlined design of microcantilever thermal transducers with a highly efficient optical readout, we minimized the fabrication complexity while achieving a competitive level of imaging performance. The microcantilever FPAs were fabricated using a straightforward fabrication process that involved only three photolithographic steps (i.e. three masks). A designed and constructed prototype of an IR imager employed a simple optical readout based on a noncoherent low-power light source. The main figures of merit of the IR imager were found to be comparable to those of uncooled MEMS infrared detectors with substantially higher degree of fabrication complexity. In particular, the NETD and the response time of the implemented MEMS IR detector were measured to be
as low as 0.5K and 6 ms, respectively. The potential of the implemented designs can also be concluded from the fact that the constructed prototype enabled IR imaging of close to room temperature objects without the use of any advanced data processing. The most unique and practically valuable feature of the implemented FPAs, however, is their scalability to high resolution formats, such as 2000x2000, without progressively growing device complexity and cost.
Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a performance analysis for microcantilever IR detectors with an optical readout. We discuss responsivity of microcantilever IR detectors and analyze the different sources (and mechanisms) of noise present in them. A model SiNx microcantilever device with an Al layer in the bimaterial region was fabricated and its performance as an IR detector was analyzed.
The present work extends the concept of microcantilever (MC) based transducers to hybrid MEMS that integrate actuation and multiple sensing modes. Theoretical models predict significant limitations for the mechanical energy produced due to molecular interactions of conventional MCs with the environment. In order to overcome these limitations, we focus on cantilever designs and technologies of nanostructured coatings that are more compatible with fluidic MEMS and provide highly efficient molecular-driven actuation as well as additional modes of selectivity. In particular, co-evaporated Au:Ag films were used to prepare nanostructured interfaces that strongly enhance both chemi-mechanical transduction and Raman scattering. Acquisition of surface enhanced Raman scattering (SERS) signals generated on the cantilevers with nanostructured gold coatings provided highly specific molecular information. Additionally, highly efficient, environmentally-responsive sensor-actuator hybrids were created using MCs made of epoxy based photoresist SU-8 that were modified with hydrogel. Immobilization of colloidal silver particles in the acrylate based hydrogels provides multi-modal functionality for these MCs. Using several alternative technologies, we have created MC transducers that exhibit micrometer scale deflections in response to changes in molecular microenvironment and provide vibrational signatures of constituents in that environment. It is anticipated that these molecular-actuated MC transducers will constitute a novel platform for future biomedical devices.
The kinetics of albumin absorption onto various solid surfaces was studied with the surface plasmon resonance technique. The following types of the samples were used in the absorption experiments: as-deposited gold layers, gold layers after oxidative washing, hydrophobic and hydrophilic plasma polymers. Absorption of the protein onto each of these surfaces was found to have some distinguishing features. The fastest kinetics and the maximum protein coverage were observed in the case of the gold layers without any pretreatment. By contrast, the absorption was almost completely suppressed in the case of the hydrophilic polymer overlayer. In addition, the effects and poly(ethylene glycol) or toluene added to the solutions were investigated. The presence of the toluene caused negligible changes in the absorption kinetics while the absorption was substantially suppressed in presence of poly(ethylene glycol). Possible mechanisms of nonspecific protein-surface interactions are analyzed in order to explain the observed differences in sorption behavior.
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