Mr. Nils Beermann Profile

Nils Beermann

at Laser Zentrum Hannover eV

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Author

Publications (4)

Proceedings Article | 22 April 2009 Paper

Long term tests of resonator optics in ArF excimer lasers

Nils Beermann, Holger Blaschke, Henrik Ehlers, Detlev Ristau, Dirk Wulff-Molder, Sigrid Jukresch, Ansgar Matern, Martin Bischoff, Dieter Gäbler, Norbert Kaiser

Proceedings Volume 7131, 713117 (2009) https://doi.org/10.1117/12.816706

KEYWORDS: Resonators, Reflectors, Contamination, Excimer lasers, Laser optics, Optical coatings, Crystals, Interfaces, Laser resonators, Mirrors

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Proceedings Article | 30 December 2008 Paper

Investigation in the degradation of CaF2 outcouplers in excimer lasers operating at 193nm

H. Blaschke, N. Beermann, H. Ehlers, D. Ristau, M. Bischoff, D. Gäbler, N. Kaiser, A. Matern, D. Wulff-Molder

Proceedings Volume 7132, 71321A (2008) https://doi.org/10.1117/12.804428

KEYWORDS: Excimer lasers, Coating, Reflectors, Transmittance, Crystals, Ions, Interfaces, Electron microscopy, Reflectivity, Carbonates

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Proceedings Article | 5 October 2005 Paper

Ion source characterization based on an array of retarding field analyzers

N. Beermann, H. Ehlers, D. Ristau

Proceedings Volume 5963, 59630H (2005) https://doi.org/10.1117/12.625215

KEYWORDS: Ions, Resolution enhancement technologies, Plasma, Coating, 3D metrology, Data centers, Optical coatings, Deposition processes, Energy efficiency, Silica

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Proceedings Article | 25 February 2004 Paper

Ion-assisted deposition processes: industrial network IntIon

Henrik Ehlers, Karl-Josef Becker, Rudolf Beckmann, Nils Beermann, Ulf Brauneck, Peter Fuhrberg, Dieter Gaebler, Stefan Jakobs, Norbert Kaiser, Michael Kennedy, Friedrich Koenig, Sven Laux, Juergen Christian Mueller, Bernd Rau, Werner Riggers, Detlev Ristau, Dieter Schaefer, Olaf Stenzel

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.514817

KEYWORDS: Ions, Plasma, Niobium, Refractive index, Deposition processes, Resolution enhancement technologies, Coating, Prototyping, Oxygen, Absorption

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