Nowadays, Superconducting Nanowire Single-Photon Detectors (SNSPDs) play a significant role in quantum technologies and for general faint light detection. Typically, NbTiN SNSPDs are at most 8nm thick to achieve single-photon sensitivity. However, as absorption increases with film thickness, it is desirable to use thicker films of 10 or 12nm considering that the absorption probability places an upper limit for the achievable system detection efficiency. In this contribution, we present for the first time 12nm thick NbTiN SNSPDs that show an increase of system detection efficiency from less than 0.01% to 55% and saturating internal detection efficiency at 4K after irradiation with helium ions. Furthermore, we investigated the influence of helium ion irradiation on the transport properties of the underlying superconducting films.
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