Dr. Oliver Paul Profile

Dr. Oliver Paul

at Carl Zeiss AG

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Publications (1)

Proceedings Article | 13 May 2013 Paper

Nanometrology of periodic nanopillar arrays by means of light scattering

Oliver Paul, Frank Widulle, Bernd Kleemann, Andreas Heinrich

Proceedings Volume 8788, 87881O (2013) https://doi.org/10.1117/12.2020880

KEYWORDS: Metrology, Data modeling, Error analysis, Scattering, Light scattering, Scatterometry, Model-based design, Silicon, Computer simulations, 3D modeling

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