Dr. Paul C. Montgomery Profile

Dr. Paul C. Montgomery

Senior Research Scientist Emeritus at ICube

SPIE Involvement:

Board of Directors | Nominating and Leadership Development Committee | Conference Program Committee | Symposium Chair | Author

Area of Expertise:

Optical instrumentation , High resolution optical microscopy , Unmarked far field optical nanoscopy , Optical metrology , Materials characterization , Scientific communication and research culture

Websites:

Personal Website | Company Website

Profile Summary

Paul Montgomery is an Emeritus Senior Research Scientist with the CNRS, at the Engineering science, computer science and imaging laboratory (ICube) in Strasbourg, France. He retired at the beginning of 2024. After doing a PhD in optical instrumentation and interferometry at Loughborough University (UK) in 1987, he carried out post-doctoral work at the University of Montpellier (France) until 1990 in high resolution near IR nanoscopy to study defects in semi-conductor materials. He joined the CNRS in 1991 and did pioneering work in white light interference microscopy, patenting a system and transferring the technology to Fogal Nanotech (Nîmes, France). He developed new modes of measurements beyond that of surface roughness and static 3D structure such as real time measurement of moving surfaces, tomographic imaging of defects inside transparent layers, and local spectroscopic and colorimetric mapping. In 2017, his group was amongst the first 3 to develop super resolution 3D profiling of nanomaterials using Linnik interferometry assisted by glass microspheres with improved lateral resolution. He has also been interested in developing the use of environmental chambers with interference microscopy for measuring specific parameters of materials such as the viscoelastic properties of ultra-thin polymer films, the evaporation of polymer micro-droplets and colloidal layers under immersion.

He has led the group working in interference microscopy since the year 2000, he led the Photonics Instrumentation and Processes (IPP) team at ICube from 2013-2017 and was head of the D-ESSP (electronics, systems and photonics) department and Deputy Director of ICube from 2018-2022. He has been the local Chair of SPIE Photonics Europe (Strasbourg, France) since 2018 and is presently a Member of the SPIE Board. He received the French National PEDR financial award for scientific excellence in research and education from 2018-2021 and is a Senior Member of SPIE, and a Member of IOP and SFO

Publications (48)

Proceedings Article | 20 June 2024 Presentation

Presentation

Oil immersed single objective light sheet microscope

Quentin Bécar, Paul Montgomery, Amir Nahas, Vincent Maioli

Proceedings Volume PC13006, PC1300617 (2024) https://doi.org/10.1117/12.3016948

KEYWORDS: Design, Objectives, Microscopes, Biological samples, Water, Silicon, Refractive index, Open source software, Software development, Fluorescence

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Proceedings Article | 19 June 2024 Presentation

Presentation

Noise correlation inspired elastography

Nina Dufour, Maud Legrand, Emmanuel Martins Seromenho, Paul Montgomery, Simon Chatelin, Amir Nahas

Proceedings Volume PC13010, PC130100H (2024) https://doi.org/10.1117/12.3017552

KEYWORDS: Elastography, Ultrasonography, Magnetic resonance imaging, Tissues, Tissue optics, Simulations, Optical coherence, Finite difference methods, Elasticity, Biomedical applications

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Proceedings Article | 13 March 2024 Poster

Poster

Noise correlation elastography for full field optical imaging systems

Nina Dufour, Maud Legrand, Emmanuel Martins Seromenho, Paul Montgomery, Amir Nahas

Proceedings Volume PC12844, PC128440W (2024) https://doi.org/10.1117/12.3002345

KEYWORDS: Elastography, Video, Endoscopes, Endoscopy, Tumors, Colorectal cancer, Ultrasonography, Optical coherence, Magnetic resonance imaging, Light sources and illumination

Proceedings Article | 16 August 2023 Presentation

Presentation

Multimodal local spectral/topographic characterization of laser-induced colored stainless steel with coherence scanning interferometry

Paul Montgomery, Sébastien Marbach, Rémy Claveau, Florie Ogor, Christophe Cordier, Jesse Schiffler, Manuel Flury

Proceedings Volume 12618, 126180O (2023) https://doi.org/10.1117/12.2673958

KEYWORDS: Laser interferometry, Stainless steel, Physical coherence, Oxides, Surface roughness, Spectroscopy, Spectral response, Reflectance spectroscopy, Nanosecond lasers, Metals

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Proceedings Article | 30 May 2022 Presentation

Presentation

Sphere choice in Mirau interferometric microsphere assisted profilometry

Rayenne Boudoukha, Stéphane Perrin, Assia Guessoum, Nacer Eddine Demagh, Paul Montgomery, Sylvain Lecler

Proceedings Volume PC12152, (2022) https://doi.org/10.1117/12.2631094

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Proceedings Article | 20 June 2021 Presentation

Presentation

Local spectroscopic characterization of materials using coherence scanning interferometry

Paul Montgomery, Sébastien Marbach, Rémy Claveau, Manuel Flury

Proceedings Volume 11782, 117820S (2021) https://doi.org/10.1117/12.2593011

KEYWORDS: Spectroscopy, Interferometry, Reflectivity, Spectrometers, Calibration, Refractive index, Near field scanning optical microscopy, Near field optics, Microscopy, Microscopes

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The large spot size of a few mm2 with spectrometers and a few thousand µm2 with ellipsometers means that classical spectroscopic characterization is limited to that of bulk materials. In the development of more recent heterogeneous materials in which there exists local variations between materials on a microscopic scale, a much smaller spot size is required for optical characterization. Several new techniques have been developed for performing local spectroscopy, such as by color camera microscopy, hyperspectral imaging microscopy, scattering type scanning near field optical microscopy (s-SNOM) or spectroscopic optical coherence tomography (s-OCT). Concerning the latter, the related technique of coherence scanning interferometry (CSI) also allows local spectroscopy by applying Fourier Transform processing to the local polychromatic interference fringe signal. This technique offers the advantages of not requiring an external spectrometer since an interferometer is incorporated in the microscope objective, but challenges remain in order to correctly adjust and calibrate the system. In this paper we present some of our latest results of using CSI to accurately measure the local spectra at a microscopic scale with a spot size a little larger than that defined by the diffraction limit, of around 1 µm. Results demonstrate measurements of local reflectance spectra at the surface of a heterogeneous sample and on small structures buried within or under a transparent layer. Other theory has been developed to allow the measurement of local transparent layer thickness and refractive index. As well as performing local point measurements, we show how with a single scan over the optical axis, 2D cartographic maps can be made of reflectance spectra together with the topographic height map of the same area. Any nanometric height errors present due to phase on reflection errors linked to the presence of complex refractive indices can then be corrected using the spectroscopic information.

Proceedings Article | 6 April 2020 Presentation

Presentation

Whispering gallery mode in super-resolution microsphere-assisted microscopy (Conference Presentation)

Rayenne Boudoukha, Stéphane Perrin, Assia Guessoum, Nacer-Eddine Demagh, Paul Montgomery, Sylvain Lecler

Proceedings Volume 11368, 1136805 (2020) https://doi.org/10.1117/12.2556771

KEYWORDS: Microscopy, Super resolution, Diffraction, Microscopes, Optical microscopes, Objectives, Image processing, Spectral resolution, Optical components, Optical transfer functions

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In classical microscopy, the diffraction of light limits the resolving power of the system, which restricts the detailed observation of nanoscale elements. From the cut-off frequency of the optical transfer function, the lateral resolution of an optical microscope can thus be quantified as 0.5 Lambda/NA, where Lambda and NA are the wavelength of the light source and the numerical aperture of the microscope objective, respectively. A white-light microscope thus allows the visualisation of objects having a minimum size that is just greater than half of the wavelength of the illumination in air. Recently, several far-field methods have been developed in order to overcome this limitation. Microsphere-assisted microscopy is one such recent technique which allows the diffraction limit to be broken. In 2011, Wang & al. developed two-dimensional super-resolution imaging through glass microspheres. They showed that microsphere-assisted microscopy distinguishes itself from others by being able to perform label-free and full-field acquisitions. In addition, with only slight modifications of classical white-light microscopy, microsphere-assisted microscopy makes it possible to reach a lateral resolution of a few hundred nanometres (~λ/7 in immersion). Placing a microsphere on a sample, directly or at a few hundred nanometres distance allows the generation of a super-resolved virtual image of the object, which is then collected by a microscope objective. Currently several studies have been aimed at providing a better understanding of the super-resolution phenomenon in microsphere imaging. Now we know that the performance in microsphere-assisted microscopy depends on the optical and geometrical parameters. According to many studies on the PJ prediction, the imaging process in microsphere-assisted microscopy can be addressed by considering the sphere as a photonic jet lens. However, recently, we demonstrated that the photonic jet (PJ) generation by a microsphere, and considered here as the point spread function, is not small enough to justify this resolution improvement in the imaging process. Although, the size of the focus spot overcomes the diffraction limit, the full width at half maximum of the PJ waist is around a third of the wavelength, which is lower than the super-resolving power which is around λ/7 in immersion. However, the PJ phenomenon can explain the imaging through the microsphere, the nature of the image, the position of the image plane and the lateral magnification dependence provided by the microsphere. Moreover, we have investigated the contrast in the virtual image according to the relative phase difference between close point sources. When the point sources are initially in-phase, the two virtual images cannot be distinguished. However, when the point sources are initially out-of-phase, the two virtual images can be clearly distinguished. Our work considers a third hypothesis by contributing to the investigation of the role of whispering gallery modes (a radially evanescent wave) in the microsphere assisted microscopy mechanism through numerical simulations using a finite element method.

Proceedings Article | 1 April 2020 Presentation + Paper

Presentation + Paper

White light interference microscopy system design

Sébastien Marbach, Christophe Cordier, Rémy Claveau, Thierry Engel, Paul Montgomery, Manuel Flury

Proceedings Volume 11352, 113521B (2020) https://doi.org/10.1117/12.2555929

KEYWORDS: 3D imaging metrology, Phase interferometry, Mirau interferometers, Optical instrument design, Optical resolution, Interferometry, Interferometers, Objectives, Signal to noise ratio, Imaging systems, Signal processing, Microscopy, Cameras, 3D metrology, Microscopes

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Proceedings Article | 1 April 2020 Presentation

Presentation

Super-resolution imaging through microspheres (Conference Presentation)

Stéphane Perrin, Sylvain Lecler, Paul Montgomery

Proceedings Volume 11352, 113520T (2020) https://doi.org/10.1117/12.2556083

KEYWORDS: Super resolution, Microscopy, Diffraction, Optical microscopes, Super resolution microscopy, Microscopes, Image acquisition, Image enhancement, Light wave propagation, Wave propagation

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Proceedings Article | 10 March 2020 Presentation

Presentation

Label-free super-resolution microsphere-assisted microscopy of biological samples (Conference Presentation)

Sylvain Lecler, Stéphane Perrin, Giorgio Quaranta, Nadia Messaddeq, Nicolas Lemercier, Jean-Luc Vonesch, Paul Montgomery

Proceedings Volume 11251, 1125112 (2020) https://doi.org/10.1117/12.2548540

KEYWORDS: Super resolution, Optical spheres, Microscopy, Microscopes, Refractive index, Biology, Luminescence, Dielectrics, Objectives, Image processing

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Proceedings Article | 22 July 2019 Presentation

Presentation

Microsphere-aided imaging of subdiffraction-limited translucent features (Conference Presentation)

Stéphane Perrin, Paul Montgomery, Sylvain Lecler

Proceedings Volume 11060, 1106005 (2019) https://doi.org/10.1117/12.2526725

KEYWORDS: Microscopy, Translucency, Microscopes, Optical components, Optical microscopes, Light sources, Objectives, Visualization, Super resolution, Glasses

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In optical microscopy, the diffraction of the light as well as the coherence limits the resolving power of the system. Observation of nanoscale elements through an optical microscope appears often to be restricted. Assuming an incoherent light source and a circular pupil, the lateral resolution of an optical microscope can thus be quantified by the cut-off frequency of the optical transfer function, given by 0.5 λ/NA, where λ and NA are the wavelength of the light source and the numerical aperture of the microscope objective, respectively. A white-light microscope thus allows the visualisation of objects having a minimum size that is just greater than half of the wavelength of the illumination in air, in ideal cases, such as features of MOEMS-based components and bacteria. In reality, imperfections or misalignment of optical components makes the resolution limit worse. Recently, several far-field methods have been developed in order to overcome this limitation, such as stimulated-emission-depletion microscopy and the negative-refractive-index superlens. In 2004, a new potential far-field microscopy technique based on the scanning photonic jet beam was proposed, leading to a lateral resolution of ~λ/3. In 2011, Wang et al. experimentally introduced the phenomenon of two-dimensional super-resolution imaging through a glass microsphere. They showed that microsphere-assisted microscopy distinguishes itself from others by being able to perform label-free and full-field acquisitions. In addition, with only slight modifications of classical white-light microscopy, microsphere-assisted microscopy makes it possible to reach a lateral resolution of a few hundred nanometres (~λ/7) which is adequate, for example, for the visualization of adenoviruses using the fluorescence effect. Placing a microsphere on (or above) a sample allows the generation of a super-resolved virtual image of the object which is then collected by a microscope objective. Although the super-resolution phenomenon is still not well understood, we now know that the performance of microsphere-aided microscopy depends on the optical and geometrical parameters. Recently, we successfully demonstrated the label-free combination of microsphere-assisted microscopy with dark-field illumination in order to image translucent samples. Random glass nanofeatures, as well as brain cell morphology, have been observed. Future work is now in progress towards the extension of 3D object inspection using interferometry.

Proceedings Article | 21 June 2019 Paper

Paper

Microsphere-assisted imaging of sub-diffraction-limited features

Sébastien Marbach, Stephane Perrin, Paul Montgomery, Manuel Flury, Sylvain Lecler

Proceedings Volume 11056, 110560R (2019) https://doi.org/10.1117/12.2526086

KEYWORDS: Microscopes, Microscopy, Super resolution, Imaging systems, 3D metrology, Optical microscopes, Image resolution, 3D image processing

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SPIE Journal Paper | 13 May 2019

Super-resolution imaging within reach

Stéphane Perrin, Paul Montgomery, Sylvain Lecler

OE, Vol. 58, Issue 05, 050501, (May 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.5.050501

KEYWORDS: Super resolution, Microscopy, Microscopes, Visualization, Confocal microscopy, Objectives, Image resolution, Imaging systems, Optical microscopy, Cameras

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Proceedings Article | 24 May 2018 Presentation

Presentation

Probing the viscoelastic properties of ultrathin polymer films by combining coherent scanning interferometry and nanobubble inflation (Conference Presentation)

Pierre Chapuis, Christian Gauthier, Damien Favier, Anne Rubin, Freddy Anstotz, Paul Montgomery

Proceedings Volume 10677, 106770U (2018) https://doi.org/10.1117/12.2306441

KEYWORDS: Interferometry, Polymers, Polymer thin films, Glasses, Software development, Physics, Microscopes, Phase shifting, Microscopy, LabVIEW

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Glass formation and glassy behavior remain areas of investigation in soft matter physics with many aspects which are still not completely understood, especially at the nanometer size-scale and close to the glass transition temperature. In the present work, we show an extension of the “nanobubble inflation” method developed by O’Connell and McKenna [Rev. Sci. Instrum. 78, 013901 (2007)] which uses an interferometric microscope (white light scanning interferometry method) to measure the surface topography of a large array of 5 μm sized nanometer thick films. These so-called free-standing films are subjected to constant inflation pressure during which the nanobubbles grow or creep with time. Measurements of multiple bubbles in real time are possible via the technique of Phase Shifting Microscopy (PSM) thanks to the fast acquisition and processing of interferometry. This has been implemented using in-house developed LabVIEW based software combined with the IMAQ Vision module. Moreover this technique has the advantage, over the AFM method of O’Connell and McKenna, to be a true non-contact technique. Using this optical configuration, there is no substrate interaction to affect the polymer chains. Here we demonstrate the method using ultra-thin films of both poly(vinyl acetate) (PVAc) and polystyrene (PS) and discuss the capabilities of the method in comparison to AFM, with its advantages and disadvantages. The viscoelastic responses of the nanobubbles are determined by measuring their time-dependent diameters and then by extracting both the stress and strain time-dependent components (here the history of the polymer films has to be taken into account). We show that the results from experiments on PVAc are consistent with the prior work on PVAc. However high stress results with PS show signs of a new non-linear response regime that could be related to the plasticity of the ultra-thin film. Our homemade setup used to apply stresses on the films is also described. This first allows the control of both temperature, using a Peltier ring which surrounds the sample, and pressure, using gas flow linked to a manometer. Then major improvements of our setup in order to solve small experimental issues are described. Finally, plans for further improvements to the cell are explained for future experiments.

Proceedings Article | 24 May 2018 Presentation + Paper

Presentation + Paper

Application of coherence scanning interferometry for local spectral characterization of transparent layers

R. Claveau, P. Montgomery, M. Flury

Proceedings Volume 10678, 106780L (2018) https://doi.org/10.1117/12.2314921

KEYWORDS: Reflectivity, Interferometry, Refractive index, Fourier transforms, Signal processing, Thin films, Spatial resolution, Reflectance spectroscopy

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In the domain of optical metrology, white light interference microscopy is mainly known for performing micro and nano surface profilometry. This is achieved by identifying the envelope peak of the fringe signal. However, the polychromatic signal is rich in information and spectral characterization may be performed through the Fourier analysis of the signal, which gives local spectroscopic information about the sample surface. The use of CSI for studying transparent layers has also been well-developed since the analysis of the reflected light provides both structural and spectral information on the layer. Through the spectral analysis of the reflected light, it has been shown that the morphological properties of a thin film structure, namely the thickness and the refractive index, can be precisely measured. In this case, either the amplitude or the phase of the thin film total reflectance spectrum are used to recover the thickness. The technique is based on the best fit between the experimentally measured spectrum with that of the theoretical model using a non-linear least-squares algorithm. Usually, this spectral method is used to investigate thin films having a thickness that does not exceed a few hundred nanometers. In this work, we apply a similar technique, based on the magnitude of the total reflectance spectrum, to study thicker transparent layers. In this case, we show that precautions regarding the effective numerical aperture of the system need to be considered to obtain consistent values of both the refractive index and the thickness. In addition, we demonstrate the possibility of extracting the depth-resolved reflectance spectra of a buried interface independently from the spectral response of the surface. The consistency of these different spectra is demonstrated by comparing the results with those obtained using a program based on electromagnetic matrix methods for stratified media. The lateral spatial resolution of the measurements attained is a spot size of around 0.84 μm for spectrally characterizing small structures.

Proceedings Article | 24 May 2018 Paper

Paper

Immersion white light scanning interferometry using elastic polymer path length compensation

Husneni Mukhtar, Paul Montgomery, Freddy Anstotz, Rémi Barillon, Anne Rubin

Proceedings Volume 10678, 1067816 (2018) https://doi.org/10.1117/12.2315474

KEYWORDS: Objectives, Mirrors, Microscopes, Water, Polymers, Liquids, Silicon, Interferometry, Beam splitters, Interferometers

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Proceedings Article | 14 March 2018 Presentation

Presentation

Microsphere-assisted microscopy: Contribution to the understanding of label-free super-resolution (Conference Presentation)

Sylvain Lecler, Stéphane Perrin, Audrey Leong-Hoï, Paul Montgomery

Proceedings Volume 10500, 105000P (2018) https://doi.org/10.1117/12.2291621

KEYWORDS: Microscopy, Super resolution, Image resolution, Dielectrics, Optical microscopes, Photonic nanostructures, Real time imaging, Spatial resolution, Image acquisition, Near field optics

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Proceedings Article | 26 June 2017 Paper

Paper

Sub-diffraction surface topography measurement using a microsphere-assisted Linnik interferometer

Paul Montgomery, Sylvain Lecler, Audrey Leong-Hoï, Stéphane Perrin, Pierre Pfeiffer

Proceedings Volume 10329, 1032918 (2017) https://doi.org/10.1117/12.2270223

KEYWORDS: Microscopy, Image resolution, Interferometry, Photonic nanostructures, Near field optics, Interferometers, Metrology, Diffraction, Inspection, Glasses

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Proceedings Article | 26 June 2017 Paper

Paper

Role of coherence in microsphere-assisted nanoscopy

Stephane Perrin, Sylvain Lecler, Audrey Leong-Hoi, Paul Montgomery

Proceedings Volume 10330, 103300V (2017) https://doi.org/10.1117/12.2270246

KEYWORDS: Spectral resolution, Optical microscopy, Optical resolution, Optical microscopes, Geometrical optics, Super resolution, Light sources, Refractive index, Microscopy, Image resolution, Super resolution microscopy, Diffraction, Near field, Coherence imaging, Modeling

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Proceedings Article | 26 April 2016 Paper

Paper

Overview of label-free far field optical nanoscopy techniques for nanometrology

Paul Montgomery, Audrey Leong-Hoï, Freddy Anstotz, Hui Liu, Bertrand Simon, Matthieu Debailleul, Olivier Haeberlé

Proceedings Volume 9890, 98900G (2016) https://doi.org/10.1117/12.2227582

KEYWORDS: Super resolution microscopy, Microscopy, Super resolution, Nanostructures, Optical imaging, Image resolution, Molecules, Digital holography, Nanoparticles, Confocal microscopy, Time division multiplexing, Tomography, Deconvolution, Optical microscopy

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Proceedings Article | 26 April 2016 Paper

Paper

Local reflectance spectra measurements of surfaces using coherence scanning interferometry

R. Claveau, P. Montgomery, M. Flury, D. Montaner

Proceedings Volume 9890, 98900Q (2016) https://doi.org/10.1117/12.2227625

KEYWORDS: Reflectivity, Spectroscopy, Interferometry, Fourier transforms, Statistical analysis, Microscopes, Cameras, Error analysis, Imaging spectroscopy, Error analysis, Signal processing, Calibration, Objectives

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Interference microscopy is a widely used technique in optical metrology for the characterization of materials and in particular for measuring the micro and nanotopography of surfaces. Depending on the processing applied to the interference signal, either topographic analysis of the sample can be carried out by identifying the envelope peak of the fringe signal, which leads to 3D surface imaging, or spectral analysis may be performed which gives spectroscopic measurements. By applying a Fourier transform to the interference fringes, information about the source spectrum, the spectral response of the optical system, and the reflectance spectrum of the surface at the origin of the interferogram can be obtained. By using a sample of known reflectivity for calibration, it is possible to extract the spectral signature of the entire system and therefore to deduce that of the surface of interest. In this paper, we first explain theoretically how to retrieve the reflectance information of a surface from the interferometric signal. Then, we present some results obtained by this means with a white light scanning Linnik interferometer on different kinds of samples (silicon, tin oxide (SnO₂), indium tin oxide (ITO)). The initial results were slightly different from those obtained with a conventional optical spectrometer until averaged temporally and were improved even further when averaged spatially. We show that the reflectance of the surface can be calculated over the given wavelength range of the effective spectrum, which is defined as the source spectrum multiplied by the spectral response of the camera and the spectral transmissivity of the optical system. We thus demonstrate that local spectroscopic measurements can be carried out with an interference microscope and that they match well with those measured with an optical spectrometer model Lambda19 UV-VIS-NIR from Perkin Elmer. A simulation study is also presented in order to validate the method and to help identify the potential sources of errors in the spectroscopic analysis.

Proceedings Article | 26 April 2016 Paper

Paper

High-resolution full-field optical coherence tomography using high dynamic range image processing

A. Leong-Hoï, R. Claveau, P. Montgomery, B. Serio, W. Uhring, F. Anstotz, M. Flury

Proceedings Volume 9890, 98900E (2016) https://doi.org/10.1117/12.2227114

KEYWORDS: Image resolution, Signal to noise ratio, Image enhancement, Signal processing

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Proceedings Article | 22 June 2015 Paper

Paper

Multi-scale roughness measurement of cementitious materials using different optical profilers and window resizing analysis

Paul Montgomery, Fabien Salzenstein, Gianto Gianto, Komla Apedo, Nicolas Serres, Christophe Fond, Françoise Feugeas

Proceedings Volume 9525, 95250Z (2015) https://doi.org/10.1117/12.2184711

KEYWORDS: Particle filters, Cements, Near field optics, Surface roughness, Polishing, Confocal microscopy, Interferometry, Radium, Microscopy, Colorimetry

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Proceedings Article | 21 June 2015 Paper

Paper

Detection of defects in a transparent polymer with high resolution tomography using white light scanning interferometry and noise reduction

A. Leong-Hoï, R. Claveau, M. Flury, W. Uhring, B. Serio, F. Anstotz, P. Montgomery

Proceedings Volume 9528, 952807 (2015) https://doi.org/10.1117/12.2184559

KEYWORDS: Image processing, Signal to noise ratio, Polymers, Tomography, Denoising, Cameras, Signal processing, Particles, Interferometry, CCD cameras

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SPIE Journal Paper | 4 March 2015

High speed implementation of a three-dimensional shape profiler with submillimeter precision using a digital light processing device and a new efficient algorithm for absolute phase retrieval

Audrey Leong-Hoï, Paul Montgomery, Bruno Serio, Patrice Twardowski

OE, Vol. 54, Issue 03, 034102, (March 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.3.034102

KEYWORDS: 3D image processing, Fringe analysis, 3D metrology, Phase retrieval, Phase shifts, Digital Light Processing, Reconstruction algorithms, Image processing, Digital filtering, Projection systems

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Proceedings Article | 1 May 2014 Paper

Paper

Photonic jet to improve the lateral resolution of laser etching

Andri Abdurrochman, Sylvain Lecler, Joël Fontaine, Frédéric Mermet, Patrick Meyrueis, Bernard Tumbelaka, Paul Montgomery

Proceedings Volume 9135, 913523 (2014) https://doi.org/10.1117/12.2052718

KEYWORDS: Optical spheres, Etching, Glasses, Silicon, Semiconducting wafers, Ferroelectric materials, Semiconductor lasers, Absorption, Nd:YAG lasers, Pulsed laser operation

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Proceedings Article | 1 May 2014 Paper

Paper

Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field

A. Leong-Hoï, B. Serio, P. Twardowski, P. Montgomery

Proceedings Volume 9132, 913219 (2014) https://doi.org/10.1117/12.2051833

KEYWORDS: 3D image processing, Fringe analysis, Reconstruction algorithms, Projection systems, Imaging systems, Microscopy, Cameras, Phase shifting, Microscopes, Image processing

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Proceedings Article | 1 May 2014 Paper

Paper

Comparison of areal measurements of the same zone of etched Si and hydroxyapatite layers on etched Si using different profiling techniques

Mohamed Guellil, Paul Montgomery, Pierre Pfeiffer, Bruno Serio

Proceedings Volume 9132, 913204 (2014) https://doi.org/10.1117/12.2051476

KEYWORDS: Silicon, Microscopes, Semiconducting wafers, Atomic force microscopy, Photomasks, Etching, 3D vision, Surface roughness, Fractal analysis, 3D metrology

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Proceedings Article | 13 May 2013 Paper

Paper

Implementation of a fringe visibility based algorithm in coherence scanning interferometry for surface roughness measurement

P. Montgomery, F. Salzenstein, D. Montaner, B. Serio, P. Pfeiffer

Proceedings Volume 8788, 87883G (2013) https://doi.org/10.1117/12.2020560

KEYWORDS: Microscopes, Surface roughness, Silicon, Interferometry, Atomic force microscopy, 3D image processing, Modulation, Semiconducting wafers, 3D metrology, Visibility

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Proceedings Article | 9 May 2012 Paper

Paper

Tomographic analysis of medium thickness transparent layers using white light scanning interferometry and XZ fringe image processing

P. Montgomery, D. Montaner, F. Salzenstein

Proceedings Volume 8430, 843014 (2012) https://doi.org/10.1117/12.927813

KEYWORDS: Image processing, Signal processing, Tomography, 3D image processing, Interferometry, Interfaces, Image quality, 3D acquisition, Silicon, Neodymium

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Proceedings Article | 27 May 2011 Paper

Paper

High-speed, on-line 4D microscopy using continuously scanning white light interferometry with a high-speed camera and real-time FPGA image processing

P. Montgomery, F. Anstotz, J. Montagna

Proceedings Volume 8082, 808210 (2011) https://doi.org/10.1117/12.889334

KEYWORDS: 3D image processing, 3D acquisition, 3D metrology, Image processing, Field programmable gate arrays, Microscopy, Image resolution, Time metrology, Image acquisition, Modulation

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Proceedings Article | 18 June 2007 Paper

Paper

Development of a 3D dynamic measurement system using a high-speed camera with white light scanning interference microscopy associated with real-time FPGA image processing

Gyasi Johnson, Paul Montgomery, Freddy Anstotz, Renaud Kiefer

Proceedings Volume 6616, 661633 (2007) https://doi.org/10.1117/12.726394

KEYWORDS: 3D metrology, 3D image processing, Field programmable gate arrays, Microscopy, Image processing, Cameras, Imaging systems, High speed cameras, Digital signal processing, Modulation

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Proceedings Article | 15 September 2006 Paper

Paper

Optimised 3D surface measurement of hydroxyapatite layers using adapted white light scanning interferometry

Emilia Pecheva, Paul Montgomery, Denis Montaner, Lilyana Pramatarova, Zenko Zanev

Proceedings Volume 6341, 634137 (2006) https://doi.org/10.1117/12.696011

KEYWORDS: Scanning electron microscopy, 3D metrology, Image processing, Interferometry, Microscopy, Particles, Bone, Teeth, Silicon, Interfaces

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Proceedings Article | 1 September 2004 Paper

Paper

Fabrication of multilevel reflective diffractive optical elements by means of laser ablation lithography

Sandrine Aubry, Philippe Gerard, Manuel Flury, Abderrazzaq Benatmane, Jean Pierre Schunck, Joel Fontaine, Paul Montgomery

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.545394

KEYWORDS: Diffractive optical elements, Etching, Reflectivity, Laser ablation, Finite-difference time-domain method, Lithography, Diffraction, Photomasks, Fabrication, High power lasers

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Proceedings Article | 17 August 2004 Paper

Paper

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Paul Montgomery, Denis Montaner, Omar Manzardo, Hans-Peter Herzig

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545663

KEYWORDS: Objectives, Mirrors, Teeth, Microopto electromechanical systems, Spectroscopy, Microscopy, 3D metrology, Fourier transforms, Point spread functions, Modulation

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Proceedings Article | 17 August 2004 Paper

Paper

Real-time measurement of microscopic surface shape using high-speed cameras with continuously scanning interference microscopy

Paul Montgomery, Cemal Draman, Wilfried Uhring, Francois Tomasini

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545724

KEYWORDS: Image processing, 3D image processing, 3D acquisition, Time metrology, Microscopy, Imaging systems, Image acquisition, 3D metrology, High speed cameras, Video

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Proceedings Article | 16 May 2003 Paper

Paper

Phase stepping microscopy for rapid control of laser crystallization of Si for flat panel display applications

A. Benatmane, Paul Montgomery, Eric Fogarassy

Proceedings Volume 5004, (2003) https://doi.org/10.1117/12.479598

KEYWORDS: Laser crystals, Silicon, Crystals, Microscopy, Semiconductor lasers, Thin films, Annealing, Beam controllers, Laser applications, Flat panel displays

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SPIE Journal Paper | 1 October 2002

Rapid prototyping of diffractive optical elements for high-power lasers using laser ablation lithography fabrication and coherence probe microscopy analysis

Manuel Flury, A. Benatmane, Philippe Gerard, Paul Montgomery, Joel Fontaine, Thierry Engel, J.P. Schunck

OE, Vol. 41, Issue 10, (October 2002) https://doi.org/10.1117/12.10.1117/1.1501569

KEYWORDS: Diffractive optical elements, Silicon, Rapid manufacturing, Laser ablation, Etching, High power lasers, Surface roughness, Photomasks, Lithography, Microscopy

Proceedings Article | 18 September 1996 Paper

Paper

Deep field refelction mode for high-resolution surface relief exploration by coherence probe microscopy

Paul Montgomery, Jean-Marc Lussert

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250774

KEYWORDS: Microscopy, Reflection, Objectives, Optical resolution, Optical microscopy, Microelectronics, Stray light, Optical interferometry, Temporal coherence, Temporal resolution

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Proceedings Article | 28 March 1995 Paper

Paper

Phase stepping digital interference microscopy (PSM) image improvements by fuzzy logic algorithms

Patrick Faurous, Pascal Vabre, Paul Montgomery, Jean-Pierre Fillard

Proceedings Volume 2424, (1995) https://doi.org/10.1117/12.205229

KEYWORDS: Fuzzy logic, Microscopy, Digital imaging, Image processing, Microelectronics, Algorithms, Lead, Microscopes, Interferometry, Interferometers

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Proceedings Article | 23 March 1995 Paper

Paper

Super-resolution 3D optical imaging of semiconductors using coherence microscopy

Paul Montgomery, Jean-Marc Lussert, Pascal Vabre, D. Benhaddou

Proceedings Volume 2412, (1995) https://doi.org/10.1117/12.205325

KEYWORDS: Microscopy, Profiling, Image resolution, Coherence (optics), Scanning electron microscopy, Super resolution, 3D image processing, Semiconductors, Microelectronics, Objectives

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Proceedings Article | 5 February 1993 Paper

Paper

Peak fringe scanning microscopy: submicron 3D measurement of semiconductor components

Paul Montgomery, Jean-Pierre Fillard

Proceedings Volume 1755, (1993) https://doi.org/10.1117/12.140772

KEYWORDS: Image processing, Microscopy, 3D metrology, 3D image processing, Interferometry, Field effect transistors, Semiconductors, Metrology, Video, Image quality

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Proceedings Article | 13 January 1993 Paper

Paper

Verification of the form of microlens arrays for atmospheric wavefront sensors using phase-stepping microscopy

Paul Montgomery, Jean-Pierre Fillard, Guy Artzner

Proceedings Volume 1751, (1993) https://doi.org/10.1117/12.138907

KEYWORDS: Microlens array, Lenses, Wavefronts, Microscopy, Spherical lenses, Atmospheric sensing, Wavefront sensors, Micro optics, Earth's atmosphere, Telescopes

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Proceedings Article | 15 December 1992 Paper

Paper

Surface defect analysis of semiconductor materials and devices using nanoscopy techniques

Denis Montaner, Paul Montgomery, Eric Andre

Proceedings Volume 1776, (1992) https://doi.org/10.1117/12.139244

KEYWORDS: Laser optics, Information operations, Microscopy, Wet etching, Interferometry, Super resolution microscopy, Metrology, Chemical analysis, Surface roughness, 3D image processing

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Proceedings Article | 1 January 1991 Paper

Paper

Laser-scanning tomography and related dark-field nanoscopy method

Paul Montgomery, Pascal Gall-Borrut, Syamsa Ardisasmita, Michel Castagne, Jacques Bonnafe, Jean-Pierre Fillard

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51106

KEYWORDS: Microscopy, Super resolution microscopy, Particles, Tomography, Semiconducting wafers, 3D image processing, Silicon, Point spread functions, Diffraction, 3D metrology

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Nanoscopy is a term that we use to describe optical techniques using digital image processing that are capable of nanometric observation and measurement. Laser Scanning Tomography (LST) is used for defect analysis in the bulk of semiconductor wafers for revealing particles as small as mm and for measuring densities of uptolO13 cm3 The unusually high contrast of the system allows us to observe submicron particles which are more than three orders of magnitude smaller than the Rayleigh criterion for the optical system. Recent work using deconvolution of point image functions enables us to perform sub-micron optical serial sectioning, for determining the depth of defects. The best conditions for classical LST (using laser illumination perpendicular to the viewing direction) are when operating further than a few microns below the surface in semiconductor wafers; ie it is ideal for bulk defect studies. The study of imperfections inside epilayers in the top ijim layer requires a modified technique. Instead of illuminating at 900 the viewing direction, the infra red laser beam is introduced obliquely to the front suffe to illuminate the defects in the epilayer while still in the dark-field mode. Combining this method with high resolution sectioning will be the basis for a technique of three dimensional submicron defect analysis in epilayers. Results are given of defect studies in annealed GaAs and silicon to demonstrate the capabilities of LST for naiiometer analysis in bulk materials. Sub-micron depth measurement is shown for single particles using the PSF of the system for the out-offocus case. Some initial results are given of studies of defects in a highly lattice mismatched epilayer using IR transmission microscopy, phase stepping microscopy (PSM, used in surface profiling) and the new dark field oblique laser illumination technique. LST, and the new nanoscopy techniques are non-destructive, operate under normal room conditions, and give sub-micron observation and distance measurement of defects over large areas with the possibility of 3D image synthesis for defect analysis.

Proceedings Article | 1 January 1991 Paper

Paper

Three-dimensional nanoprofiling of semiconductor surfaces

Paul Montgomery, Jean-Pierre Fillard, N. Tchandjou, Syamsa Ardisasmita

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51100

KEYWORDS: Surface roughness, Profiling, Semiconductors, Surface finishing, Etching, 3D metrology, Microscopy, Optical testing, Optical inspection, Cameras

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Proceedings Article | 1 December 1990 Paper

Paper

Light scattering on nanoaggregates in bulk indium phosphide materials

Jean-Marc Lussert, Paul Montgomery, Jean-Pierre Fillard, Jacques Bonnafe

Proceedings Volume 1331, (1990) https://doi.org/10.1117/12.22646

KEYWORDS: Light scattering, Scattering, Laser scattering, Particles, Semiconducting wafers, Mie scattering, Cameras, Manufacturing, Crystals, Indium

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Proceedings Article | 1 November 1990 Paper

Paper

Dark-field optical microscopy in semiconductor materials: a typical answerable inverse problem

Jean-Pierre Fillard, Paul Montgomery, Syamsa Ardisasmita, Pascal Gall-Borrut

Proceedings Volume 1351, (1990) https://doi.org/10.1117/12.23630

KEYWORDS: Optical microscopy, Semiconductor materials, Inverse problems

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Showing 5 of 48 publications

Conference Committee Involvement (13)

SPIE Photonics Europe

12 April 2026 | Strasbourg, France

Optics and Photonics for Advanced Dimensional Metrology III

9 April 2024 | Strasbourg, France

SPIE Photonics Europe

7 April 2024 | Strasbourg, France

Optics and Photonics for Advanced Dimensional Metrology II

5 April 2022 | Strasbourg, France

SPIE Photonics Europe

3 April 2022 | Strasbourg, France

Showing 5 of 13 Conference Committees

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