Prof. Peng Zhang Profile

Prof. Peng Zhang

at Harbin Institute of Technology

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Author

Publications (3)

Proceedings Article | 23 December 2023 Paper

Elucidating the surface damage behavior of sol-gel silica anti-reflective films during low-pressure plasma cleaning

Yuhai Li, Xujie Liu, Yilan Jiang, Guorui Zhou, Qiang Yuan, Xiaodong Yuan, Fang Wang, Laixi Sun, Lihua Lu, Peng Zhang, Qingshun Bai

Proceedings Volume 12982, 129820C (2023) https://doi.org/10.1117/12.3014859

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Proceedings Article | 22 December 2023 Paper

Analysis of grating surface organic contamination in chirped pulse amplification system

Yuhai Li, Bin Zhu, Gang Li, Na Xie, Kainan Zhou, Qiang Yuan, Xiaodong Yuan, Fang Wang, Laixi Sun, Lihua Lu, Peng Zhang, Qingshun Bai

Proceedings Volume 12974, 1297402 (2023) https://doi.org/10.1117/12.3013651

KEYWORDS: Contamination, Optical gratings, Gold, Diffraction gratings, Natural surfaces, Optical components, Laser irradiation, Molecules, Diffraction, Vacuum

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Proceedings Article | 19 November 2021 Presentation + Paper

In-situ cleaning organic contaminants on SiO2 sol-gel antireflection film by low-pressure air plasma

Yuhai Li, Qingshun Bai, Rongqi Shen, Peng Zhang, Lihua Lu, Xiaodong Yuan, Xinxiang Miao, Wei Han, Hao Liu, Lin Huang, Caizhen Yao

Proceedings Volume 11910, 1191017 (2021) https://doi.org/10.1117/12.2599668

KEYWORDS: Plasma, Sol-gels, Optical components, Transmittance, Oxygen, Contamination, Natural surfaces, Chemical reactions, Antireflective coatings, Carbon

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